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Otsuka, Takamitsu, Kilbane, Deirdre, Higashiguchi, Takeshi, Yugami, Noboru, Yatagai, Toyohiko, Jiang, Weihua, Endo, Akira, Dunne, Padraig, O’Sullivan, Gerry (2010) Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources. Applied Physics Letters, 97 (23). 231503pp. doi:10.1063/1.3526383

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Reference TypeJournal (article/letter/editorial)
TitleSystematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources
JournalApplied Physics Letters
AuthorsOtsuka, TakamitsuAuthor
Kilbane, DeirdreAuthor
Higashiguchi, TakeshiAuthor
Yugami, NoboruAuthor
Yatagai, ToyohikoAuthor
Jiang, WeihuaAuthor
Endo, AkiraAuthor
Dunne, PadraigAuthor
O’Sullivan, GerryAuthor
Year2010 (December 6)Volume97
Issue23
PublisherAIP Publishing
DOIdoi:10.1063/1.3526383Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID8588906Long-form Identifiermindat:1:5:8588906:4
GUID0
Full ReferenceOtsuka, Takamitsu, Kilbane, Deirdre, Higashiguchi, Takeshi, Yugami, Noboru, Yatagai, Toyohiko, Jiang, Weihua, Endo, Akira, Dunne, Padraig, O’Sullivan, Gerry (2010) Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources. Applied Physics Letters, 97 (23). 231503pp. doi:10.1063/1.3526383
Plain TextOtsuka, Takamitsu, Kilbane, Deirdre, Higashiguchi, Takeshi, Yugami, Noboru, Yatagai, Toyohiko, Jiang, Weihua, Endo, Akira, Dunne, Padraig, O’Sullivan, Gerry (2010) Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources. Applied Physics Letters, 97 (23). 231503pp. doi:10.1063/1.3526383
In(2010, December) Applied Physics Letters Vol. 97 (23) AIP Publishing

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