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Bollanti, S., Di Lazzaro, P., Flora, F., Mezi, L., Murra, D., Torre, A. (2006) Conventional and modified Schwarzschild objective for EUV lithography: design relations. Applied Physics B, 85 (4). 603-610 doi:10.1007/s00340-006-2405-9

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Reference TypeJournal (article/letter/editorial)
TitleConventional and modified Schwarzschild objective for EUV lithography: design relations
JournalApplied Physics B
AuthorsBollanti, S.Author
Di Lazzaro, P.Author
Flora, F.Author
Mezi, L.Author
Murra, D.Author
Torre, A.Author
Year2006 (November 10)Volume85
Issue4
PublisherSpringer Science and Business Media LLC
DOIdoi:10.1007/s00340-006-2405-9Search in ResearchGate
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Mindat Ref. ID9019596Long-form Identifiermindat:1:5:9019596:9
GUID0
Full ReferenceBollanti, S., Di Lazzaro, P., Flora, F., Mezi, L., Murra, D., Torre, A. (2006) Conventional and modified Schwarzschild objective for EUV lithography: design relations. Applied Physics B, 85 (4). 603-610 doi:10.1007/s00340-006-2405-9
Plain TextBollanti, S., Di Lazzaro, P., Flora, F., Mezi, L., Murra, D., Torre, A. (2006) Conventional and modified Schwarzschild objective for EUV lithography: design relations. Applied Physics B, 85 (4). 603-610 doi:10.1007/s00340-006-2405-9
In(2006, November) Applied Physics B Vol. 85 (4) Springer Science and Business Media LLC

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Bollanti, S., Di Lazzaro, P., Flora, F., Mezi, L., Murra, D., Torre, A. (2008) Further comparisons between the conventional and the modified Schwarzschild objectives. Applied Physics B, 91 (1). 127-137 doi:10.1007/s00340-008-2970-1
Bollanti, S., Di Lazzaro, P., Flora, F., Mezi, L., Murra, D., Torre, A. (2009) Laser–plasma–source debris-related investigations: an aspect of the ENEA micro-exposure tool. Applied Physics B, 96 (2). 479-490 doi:10.1007/s00340-009-3583-z
Bollanti, S., Di Lazzaro, P., Flora, F., Mezi, L., Murra, D., Torre, A. (2013) New technique for aberration diagnostics and alignment of an extreme ultraviolet Schwarzschild objective. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 720. 168-172 doi:10.1016/j.nima.2012.12.008
Bollanti, S., Di Lazzaro, P., Flora, F., Mezi, L., Murra, D., Torre, A. (2008) First results of high-resolution patterning by the ENEA laboratory-scale extreme ultraviolet projection lithography system. EPL (Europhysics Letters), 84. 58003pp. doi:10.1209/0295-5075/84/58003
Di Lazzaro, Paolo, Bollanti, Sarah, Flora, Francesco, Mezi, Luca, Murra, Daniele, Torre, Amalia (2013) Mitigation of ion and particulate emission from laser-produced plasmas used for extreme ultraviolet lithography. Applied Surface Science, 272. 13-18 doi:10.1016/j.apsusc.2012.03.155
Bollanti, S., De Meis, D., Di Lazzaro, P., Flora, F., Gallerano, G. P., Mezi, L., Murra, D., Vicca, D. (2016) Performance of an electro-optical solar compass in partially obscured Sun conditions. Applied Optics, 55. 3126pp. doi:10.1364/ao.55.003126
Bollanti, S., Bonfigli, F., Di Lazzaro, P., Flora, F., Giordano, G., Letardi, T., Murra, D., Schina, G., Zheng, C. E. (2001) Pulsed x-ray generator for commercial gas lasers. Review of Scientific Instruments, 72 (10). 3983-3987 doi:10.1063/1.1405789
Budano, Antonio, Flora, Francesco, Mezi, Luca (2006) Analytical design method for a modified Schwarzschild optics. Applied Optics, 45. 4254pp. doi:10.1364/ao.45.004254
Flora, Francesco, Andreoli, Fabrizio, Bollanti, Sarah, De Franceschini, Marina, Di Lazzaro, Paolo, Gallerano, Gian Piero, Mezi, Luca, Murra, Daniele, Veneziano, Giuseppe (2022) High-accuracy orientation survey in the Tiberius’ Cave near Sperlonga. Journal of Cultural Heritage, 55. 138-142 doi:10.1016/j.culher.2022.03.008
Bollanti, S., Bonfigli, F., Di Lazzaro, P., Faenov, A., Flora, F., Giordano, G., Letardi, T., Limongi, T., Mezi, L., Murra, D., Pikuz, T., Palladino, L., Reale, A., Reale, L., Ritucci, A., Scafati, A., Tomassetti, G., Vitali, A., Zheng, C. E. (2001) Applications des plasmas produits par le laser à excimères HERCULES-L : du recuit du silicium à la lithographie par rayons X. Le Journal de Physique IV, 11. doi:10.1051/jp4:2001743
Bollanti, S., Di Lazzaro, P., Murra, D. (2004) More about the light beam shaping by the integration method. The European Physical Journal Applied Physics, 28 (2). 179-186 doi:10.1051/epjap:2004164
 
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