Pogrebnyak, A. D., Beresnev, V. M., Shpak, A. P., Konarskii, P., Komarov, F. F., Kirik, G. V., Makhmudov, N. A., Kolesnikov, D. A., Uglov, V. V., Sobol, O. V., Kaverin, M. V., Grudnitskii, V. V. (2012) Effect of deposition parameters on the superhardness and stoichiometry of nanostructured Ti–Hf–Si–N films. Russian Physics Journal, 54 (11). 1218-1225 doi:10.1007/s11182-012-9734-4
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Effect of deposition parameters on the superhardness and stoichiometry of nanostructured Ti–Hf–Si–N films | ||
| Journal | Russian Physics Journal | ||
| Authors | Pogrebnyak, A. D. | Author | |
| Beresnev, V. M. | Author | ||
| Shpak, A. P. | Author | ||
| Konarskii, P. | Author | ||
| Komarov, F. F. | Author | ||
| Kirik, G. V. | Author | ||
| Makhmudov, N. A. | Author | ||
| Kolesnikov, D. A. | Author | ||
| Uglov, V. V. | Author | ||
| Sobol, O. V. | Author | ||
| Kaverin, M. V. | Author | ||
| Grudnitskii, V. V. | Author | ||
| Year | 2012 (April) | Volume | 54 |
| Issue | 11 | ||
| Publisher | Springer Science and Business Media LLC | ||
| DOI | doi:10.1007/s11182-012-9734-4Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 9035479 | Long-form Identifier | mindat:1:5:9035479:3 |
| GUID | 0 | ||
| Full Reference | Pogrebnyak, A. D., Beresnev, V. M., Shpak, A. P., Konarskii, P., Komarov, F. F., Kirik, G. V., Makhmudov, N. A., Kolesnikov, D. A., Uglov, V. V., Sobol, O. V., Kaverin, M. V., Grudnitskii, V. V. (2012) Effect of deposition parameters on the superhardness and stoichiometry of nanostructured Ti–Hf–Si–N films. Russian Physics Journal, 54 (11). 1218-1225 doi:10.1007/s11182-012-9734-4 | ||
| Plain Text | Pogrebnyak, A. D., Beresnev, V. M., Shpak, A. P., Konarskii, P., Komarov, F. F., Kirik, G. V., Makhmudov, N. A., Kolesnikov, D. A., Uglov, V. V., Sobol, O. V., Kaverin, M. V., Grudnitskii, V. V. (2012) Effect of deposition parameters on the superhardness and stoichiometry of nanostructured Ti–Hf–Si–N films. Russian Physics Journal, 54 (11). 1218-1225 doi:10.1007/s11182-012-9734-4 | ||
| In | (2012, April) Russian Physics Journal Vol. 54 (11) Springer Science and Business Media LLC | ||
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