Khristoliubova, V I, Kashapov, N F, Shaekhov, M F (2016) Gas and plasma dynamics of RF discharge jet of low pressure in a vacuum chamber with flat electrodes and inside tube, influence of RF discharge on the steel surface parameters. IOP Conference Series: Materials Science and Engineering, 134. 12017pp. doi:10.1088/1757-899x/134/1/012017
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Gas and plasma dynamics of RF discharge jet of low pressure in a vacuum chamber with flat electrodes and inside tube, influence of RF discharge on the steel surface parameters | ||
Journal | IOP Conference Series: Materials Science and Engineering | ||
Authors | Khristoliubova, V I | Author | |
Kashapov, N F | Author | ||
Shaekhov, M F | Author | ||
Year | 2016 (June) | Volume | 134 |
Publisher | IOP Publishing | ||
DOI | doi:10.1088/1757-899x/134/1/012017Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 9781837 | Long-form Identifier | mindat:1:5:9781837:9 |
GUID | 0 | ||
Full Reference | Khristoliubova, V I, Kashapov, N F, Shaekhov, M F (2016) Gas and plasma dynamics of RF discharge jet of low pressure in a vacuum chamber with flat electrodes and inside tube, influence of RF discharge on the steel surface parameters. IOP Conference Series: Materials Science and Engineering, 134. 12017pp. doi:10.1088/1757-899x/134/1/012017 | ||
Plain Text | Khristoliubova, V I, Kashapov, N F, Shaekhov, M F (2016) Gas and plasma dynamics of RF discharge jet of low pressure in a vacuum chamber with flat electrodes and inside tube, influence of RF discharge on the steel surface parameters. IOP Conference Series: Materials Science and Engineering, 134. 12017pp. doi:10.1088/1757-899x/134/1/012017 | ||
In | (n.d.) IOP Conference Series: Materials Science and Engineering Vol. 134. IOP Publishing |
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