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Leonova, L A, Boytsova, E L, Pustovalova, A A (2016) The study of titanium oxynitride coatings solubility deposited by reactive magnetron sputtering. IOP Conference Series: Materials Science and Engineering, 135. 12026pp. doi:10.1088/1757-899x/135/1/012026

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Reference TypeJournal (article/letter/editorial)
TitleThe study of titanium oxynitride coatings solubility deposited by reactive magnetron sputtering
JournalIOP Conference Series: Materials Science and Engineering
AuthorsLeonova, L AAuthor
Boytsova, E LAuthor
Pustovalova, A AAuthor
Year2016 (June)Volume135
PublisherIOP Publishing
DOIdoi:10.1088/1757-899x/135/1/012026Search in ResearchGate
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Mindat Ref. ID9781898Long-form Identifiermindat:1:5:9781898:0
GUID0
Full ReferenceLeonova, L A, Boytsova, E L, Pustovalova, A A (2016) The study of titanium oxynitride coatings solubility deposited by reactive magnetron sputtering. IOP Conference Series: Materials Science and Engineering, 135. 12026pp. doi:10.1088/1757-899x/135/1/012026
Plain TextLeonova, L A, Boytsova, E L, Pustovalova, A A (2016) The study of titanium oxynitride coatings solubility deposited by reactive magnetron sputtering. IOP Conference Series: Materials Science and Engineering, 135. 12026pp. doi:10.1088/1757-899x/135/1/012026
In(n.d.) IOP Conference Series: Materials Science and Engineering Vol. 135. IOP Publishing

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