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Zhang, Jun-Ying, Lim, Boon, Boyd, Ian W (2000) Deposition and annealing of tantalum pentoxide films using 172 nm excimer lamp. Applied Surface Science, 154. 382-386 doi:10.1016/s0169-4332(99)00387-6

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Reference TypeJournal (article/letter/editorial)
TitleDeposition and annealing of tantalum pentoxide films using 172 nm excimer lamp
JournalApplied Surface Science
AuthorsZhang, Jun-YingAuthor
Lim, BoonAuthor
Boyd, Ian WAuthor
Year2000 (February)Volume154
PublisherElsevier BV
DOIdoi:10.1016/s0169-4332(99)00387-6Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID9901636Long-form Identifiermindat:1:5:9901636:4
GUID0
Full ReferenceZhang, Jun-Ying, Lim, Boon, Boyd, Ian W (2000) Deposition and annealing of tantalum pentoxide films using 172 nm excimer lamp. Applied Surface Science, 154. 382-386 doi:10.1016/s0169-4332(99)00387-6
Plain TextZhang, Jun-Ying, Lim, Boon, Boyd, Ian W (2000) Deposition and annealing of tantalum pentoxide films using 172 nm excimer lamp. Applied Surface Science, 154. 382-386 doi:10.1016/s0169-4332(99)00387-6
In(n.d.) Applied Surface Science Vol. 154. Elsevier BV

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Zhang, Jun-Ying, Hopp, B., Geretovszky, Z., Boyd, Ian W. (2000) Photo-deposition of tantalum pentoxide film using 222 nm excimer lamps. Applied Surface Science, 168. 307-311 doi:10.1016/s0169-4332(00)00768-6
Zhang, Jun-Ying, Boyd, Ian W (2000) Ultraviolet annealing of thin films grown by pulsed laser deposition. Applied Surface Science, 154. 17-21 doi:10.1016/s0169-4332(99)00406-7
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Zhang, Jun-Ying, Boyd, Ian W. (2000) Formation of silicon dioxide layers during UV annealing of tantalum pentoxide film. Applied Surface Science, 168. 312-315 doi:10.1016/s0169-4332(00)00770-4
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Zhang, Jun-Ying, Boyd, Ian W (2000) Thin tantalum and tantalum oxide films grown by pulsed laser deposition. Applied Surface Science, 168. 234-238 doi:10.1016/s0169-4332(00)00605-x
Zhang, Jun-Ying, Fang, Qi, Boyd, Ian W. (1999) Growth of tantalum pentoxide film by pulsed laser deposition. Applied Surface Science, 138. 320-324 doi:10.1016/s0169-4332(98)00413-9
Zhang, Jun-Ying, Boyd, Ian W. (2000) Lifetime investigation of excimer UV sources. Applied Surface Science, 168. 296-299 doi:10.1016/s0169-4332(00)00628-0
Zhang, Jun-Ying, Boyd, Ian W, Esrom, Hilmar (1997) Excimer laser-induced surface activation of alumina for electroless metal deposition. Applied Surface Science, 109. 253-258 doi:10.1016/s0169-4332(96)00666-6
Fang, Q., Zhang, Jun-Ying, Boyd, Ian W. (2003) Rapid oxidation of silicon using 126 nm excimer radiation at low pressure. Applied Surface Science, 208. 369-373 doi:10.1016/s0169-4332(02)01403-4
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