Chappé, J.-M., Martin, N., Pierson, J.F., Terwagne, G., Lintymer, J., Gavoille, J., Takadoum, J. (2004) Influence of substrate temperature on titanium oxynitride thin films prepared by reactive sputtering. Applied Surface Science, 225. 29-38 doi:10.1016/j.apsusc.2003.09.028
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Influence of substrate temperature on titanium oxynitride thin films prepared by reactive sputtering | ||
| Journal | Applied Surface Science | ||
| Authors | Chappé, J.-M. | Author | |
| Martin, N. | Author | ||
| Pierson, J.F. | Author | ||
| Terwagne, G. | Author | ||
| Lintymer, J. | Author | ||
| Gavoille, J. | Author | ||
| Takadoum, J. | Author | ||
| Year | 2004 (March) | Volume | 225 |
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/j.apsusc.2003.09.028Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 9905827 | Long-form Identifier | mindat:1:5:9905827:2 |
| GUID | 0 | ||
| Full Reference | Chappé, J.-M., Martin, N., Pierson, J.F., Terwagne, G., Lintymer, J., Gavoille, J., Takadoum, J. (2004) Influence of substrate temperature on titanium oxynitride thin films prepared by reactive sputtering. Applied Surface Science, 225. 29-38 doi:10.1016/j.apsusc.2003.09.028 | ||
| Plain Text | Chappé, J.-M., Martin, N., Pierson, J.F., Terwagne, G., Lintymer, J., Gavoille, J., Takadoum, J. (2004) Influence of substrate temperature on titanium oxynitride thin films prepared by reactive sputtering. Applied Surface Science, 225. 29-38 doi:10.1016/j.apsusc.2003.09.028 | ||
| In | (n.d.) Applied Surface Science Vol. 225. Elsevier BV | ||
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