Flores, M., Huerta, L., Escamilla, R., Andrade, E., Muhl, S. (2007) Effect of substrate bias voltage on corrosion of TiN/Ti multilayers deposited by magnetron sputtering. Applied Surface Science, 253. 7192-7196 doi:10.1016/j.apsusc.2007.02.203
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Effect of substrate bias voltage on corrosion of TiN/Ti multilayers deposited by magnetron sputtering | ||
Journal | Applied Surface Science | ||
Authors | Flores, M. | Author | |
Huerta, L. | Author | ||
Escamilla, R. | Author | ||
Andrade, E. | Author | ||
Muhl, S. | Author | ||
Year | 2007 (June) | Volume | 253 |
Publisher | Elsevier BV | ||
DOI | doi:10.1016/j.apsusc.2007.02.203Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 9909814 | Long-form Identifier | mindat:1:5:9909814:6 |
GUID | 0 | ||
Full Reference | Flores, M., Huerta, L., Escamilla, R., Andrade, E., Muhl, S. (2007) Effect of substrate bias voltage on corrosion of TiN/Ti multilayers deposited by magnetron sputtering. Applied Surface Science, 253. 7192-7196 doi:10.1016/j.apsusc.2007.02.203 | ||
Plain Text | Flores, M., Huerta, L., Escamilla, R., Andrade, E., Muhl, S. (2007) Effect of substrate bias voltage on corrosion of TiN/Ti multilayers deposited by magnetron sputtering. Applied Surface Science, 253. 7192-7196 doi:10.1016/j.apsusc.2007.02.203 | ||
In | (n.d.) Applied Surface Science Vol. 253. Elsevier BV |
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