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Prabhu, Vivek M., Sambasivan, Sharadha, Fischer, Daniel, Sundberg, Linda K., Allen, Robert D. (2006) Quantitative depth profiling of photoacid generators in photoresist materials by near-edge X-ray absorption fine structure spectroscopy. Applied Surface Science, 253. 1010-1014 doi:10.1016/j.apsusc.2006.03.089

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Reference TypeJournal (article/letter/editorial)
TitleQuantitative depth profiling of photoacid generators in photoresist materials by near-edge X-ray absorption fine structure spectroscopy
JournalApplied Surface Science
AuthorsPrabhu, Vivek M.Author
Sambasivan, SharadhaAuthor
Fischer, DanielAuthor
Sundberg, Linda K.Author
Allen, Robert D.Author
Year2006 (November)Volume253
PublisherElsevier BV
DOIdoi:10.1016/j.apsusc.2006.03.089Search in ResearchGate
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Mindat Ref. ID9910117Long-form Identifiermindat:1:5:9910117:6
GUID0
Full ReferencePrabhu, Vivek M., Sambasivan, Sharadha, Fischer, Daniel, Sundberg, Linda K., Allen, Robert D. (2006) Quantitative depth profiling of photoacid generators in photoresist materials by near-edge X-ray absorption fine structure spectroscopy. Applied Surface Science, 253. 1010-1014 doi:10.1016/j.apsusc.2006.03.089
Plain TextPrabhu, Vivek M., Sambasivan, Sharadha, Fischer, Daniel, Sundberg, Linda K., Allen, Robert D. (2006) Quantitative depth profiling of photoacid generators in photoresist materials by near-edge X-ray absorption fine structure spectroscopy. Applied Surface Science, 253. 1010-1014 doi:10.1016/j.apsusc.2006.03.089
In(n.d.) Applied Surface Science Vol. 253. Elsevier BV

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Hemraj-Benny, Tirandai, BanerjeeCurrent address: Department, Sarbajit, Sambasivan, Sharadha, Fischer, Daniel A., Han, Weiqiang, Misewich, James A., Wong, Stanislaus S. (2005) Investigating the structure of boron nitride nanotubes by near-edge X-ray absorption fine structure (NEXAFS) spectroscopy. Physical Chemistry Chemical Physics, 7 (6). 1103pp. doi:10.1039/b415423a
Banerjee, Sarbajit, Hemraj-Benny, Tirandai, Sambasivan, Sharadha, Fischer, Daniel A., Misewich, James A., Wong, Stanislaus S. (2005) Near-Edge X-ray Absorption Fine Structure Investigations of Order in Carbon Nanotube-Based Systems†. The Journal of Physical Chemistry B, 109 (17). 8489-8495 doi:10.1021/jp047408t
Lenhart, Joseph L., Fischer, Daniel A., Sambasivan, Sharadha, Lin, Eric K., Jones, Ronald L., Soles, Christopher L., Wu, Wen-li, Goldfarb, Dario L., Angelopoulos, Marie (2005) X-ray Absorption Spectroscopy To Probe Surface Composition and Surface Deprotection in Photoresist Films. Langmuir, 21. 4007-4015 doi:10.1021/la047160z
Lenhart, Joseph L., Fischer, Daniel, Sambasivan, Sharadha, Lin, Eric K., Wu, Wen-Li, Guerrero, Douglas J., Wang, Yubao, Puligadda, Rama (2007) Understanding deviations in lithographic patterns near interfaces: Characterization of bottom anti-reflective coatings (BARC) and the BARC–resist interface. Applied Surface Science, 253. 4166-4175 doi:10.1016/j.apsusc.2006.09.022
Coleman, V.A., Petravić, M., Kim, K.-J., Kim, B., Li, G. (2006) Near-edge X-ray absorption fine-structure studies of GaN under low-energy nitrogen ion bombardment. Applied Surface Science, 252. 3413-3416 doi:10.1016/j.apsusc.2005.06.007
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Pollakowski, Beatrix, Beckhoff, Burkhard (2015) Nondestructive Speciation Depth Profiling of Complex TiOx Nanolayer Structures by Grazing Incidence X-ray Fluorescence Analysis and Near Edge X-ray Absorption Fine Structure Spectroscopy. Analytical Chemistry, 87 (15). 7705-7711 doi:10.1021/acs.analchem.5b01172
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