Zhu, L.Q., Fang, Q., Wang, X.J., Zhang, J.P., Liu, M., He, G., Zhang, L.D. (2008) Structural, optical properties and band gap alignments of ZrOxNy thin films on Si (100) by radio frequency sputtering at different deposition temperatures. Applied Surface Science, 254. 5439-5444 doi:10.1016/j.apsusc.2008.02.073
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Structural, optical properties and band gap alignments of ZrOxNy thin films on Si (100) by radio frequency sputtering at different deposition temperatures | ||
| Journal | Applied Surface Science | ||
| Authors | Zhu, L.Q. | Author | |
| Fang, Q. | Author | ||
| Wang, X.J. | Author | ||
| Zhang, J.P. | Author | ||
| Liu, M. | Author | ||
| He, G. | Author | ||
| Zhang, L.D. | Author | ||
| Year | 2008 (June) | Volume | 254 |
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/j.apsusc.2008.02.073Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 9911345 | Long-form Identifier | mindat:1:5:9911345:4 |
| GUID | 0 | ||
| Full Reference | Zhu, L.Q., Fang, Q., Wang, X.J., Zhang, J.P., Liu, M., He, G., Zhang, L.D. (2008) Structural, optical properties and band gap alignments of ZrOxNy thin films on Si (100) by radio frequency sputtering at different deposition temperatures. Applied Surface Science, 254. 5439-5444 doi:10.1016/j.apsusc.2008.02.073 | ||
| Plain Text | Zhu, L.Q., Fang, Q., Wang, X.J., Zhang, J.P., Liu, M., He, G., Zhang, L.D. (2008) Structural, optical properties and band gap alignments of ZrOxNy thin films on Si (100) by radio frequency sputtering at different deposition temperatures. Applied Surface Science, 254. 5439-5444 doi:10.1016/j.apsusc.2008.02.073 | ||
| In | (n.d.) Applied Surface Science Vol. 254. Elsevier BV | ||
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