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Tan, Shuyong, Zhang, Xuhai, Wu, Xiangjun, Fang, Feng, Jiang, Jianqing (2011) Effect of substrate bias and temperature on magnetron sputtered CrSiN films. Applied Surface Science, 257. 1850-1853 doi:10.1016/j.apsusc.2010.08.114

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Reference TypeJournal (article/letter/editorial)
TitleEffect of substrate bias and temperature on magnetron sputtered CrSiN films
JournalApplied Surface Science
AuthorsTan, ShuyongAuthor
Zhang, XuhaiAuthor
Wu, XiangjunAuthor
Fang, FengAuthor
Jiang, JianqingAuthor
Year2011 (January)Volume257
PublisherElsevier BV
DOIdoi:10.1016/j.apsusc.2010.08.114Search in ResearchGate
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Mindat Ref. ID9916996Long-form Identifiermindat:1:5:9916996:7
GUID0
Full ReferenceTan, Shuyong, Zhang, Xuhai, Wu, Xiangjun, Fang, Feng, Jiang, Jianqing (2011) Effect of substrate bias and temperature on magnetron sputtered CrSiN films. Applied Surface Science, 257. 1850-1853 doi:10.1016/j.apsusc.2010.08.114
Plain TextTan, Shuyong, Zhang, Xuhai, Wu, Xiangjun, Fang, Feng, Jiang, Jianqing (2011) Effect of substrate bias and temperature on magnetron sputtered CrSiN films. Applied Surface Science, 257. 1850-1853 doi:10.1016/j.apsusc.2010.08.114
In(n.d.) Applied Surface Science Vol. 257. Elsevier BV

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TAN, SHUYONG, ZHANG, XUHAI, ZHANG, YAN, JIANG, JIANQING (2013) EFFECT OF SUBSTRATE TEMPERATURE ON MICROSTRUCTURE AND WEAR BEHAVIOR OF MAGNETRON SPUTTERED CrCuN FILMS. Surface Review and Letters, 20 (6). 1350061pp. doi:10.1142/s0218625x13500613
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