Reference Type | Journal (article/letter/editorial) |
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Title | Silicon atomic layer growth using flash heating in CVD |
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Journal | Le Journal de Physique IV |
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Authors | SAKURABA, M. | Author |
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MUROTA, J. | Author |
ONO, S. | Author |
Year | 1993 (August) | Volume | 3 |
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Publisher | EDP Sciences |
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DOI | doi:10.1051/jp4:1993362Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 10296072 | Long-form Identifier | mindat:1:5:10296072:5 |
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GUID | 0 |
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Full Reference | SAKURABA, M., MUROTA, J., ONO, S. (1993) Silicon atomic layer growth using flash heating in CVD. Le Journal de Physique IV, 3. doi:10.1051/jp4:1993362 |
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Plain Text | SAKURABA, M., MUROTA, J., ONO, S. (1993) Silicon atomic layer growth using flash heating in CVD. Le Journal de Physique IV, 3. doi:10.1051/jp4:1993362 |
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In | (n.d.) Le Journal de Physique IV Vol. 3. EDP Sciences |
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