Watch the Dallas Symposium LIVE, and fundraiser auction
Ticket proceeds support mindat.org! - click here...
Log InRegister
Quick Links : The Mindat ManualThe Rock H. Currier Digital LibraryMindat Newsletter [Free Download]
Home PageAbout MindatThe Mindat ManualHistory of MindatCopyright StatusWho We AreContact UsAdvertise on Mindat
Donate to MindatCorporate SponsorshipSponsor a PageSponsored PagesMindat AdvertisersAdvertise on Mindat
Learning CenterWhat is a mineral?The most common minerals on earthInformation for EducatorsMindat ArticlesThe ElementsThe Rock H. Currier Digital LibraryGeologic Time
Minerals by PropertiesMinerals by ChemistryAdvanced Locality SearchRandom MineralRandom LocalitySearch by minIDLocalities Near MeSearch ArticlesSearch GlossaryMore Search Options
Search For:
Mineral Name:
Locality Name:
Keyword(s):
 
The Mindat ManualAdd a New PhotoRate PhotosLocality Edit ReportCoordinate Completion ReportAdd Glossary Item
Mining CompaniesStatisticsUsersMineral MuseumsClubs & OrganizationsMineral Shows & EventsThe Mindat DirectoryDevice SettingsThe Mineral Quiz
Photo SearchPhoto GalleriesSearch by ColorNew Photos TodayNew Photos YesterdayMembers' Photo GalleriesPast Photo of the Day GalleryPhotography

Izumi, A., Sato, H., Matsumura, H. (2001) Formation of high moisture and dopant diffusion resistivity silicon nitride films by catalytic-CVD method. Le Journal de Physique IV, 11. doi:10.1051/jp4:20013112

Advanced
   -   Only viewable:
Reference TypeJournal (article/letter/editorial)
TitleFormation of high moisture and dopant diffusion resistivity silicon nitride films by catalytic-CVD method
JournalLe Journal de Physique IV
AuthorsIzumi, A.Author
Sato, H.Author
Matsumura, H.Author
Year2001 (August)Volume11
PublisherEDP Sciences
DOIdoi:10.1051/jp4:20013112Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID10302019Long-form Identifiermindat:1:5:10302019:0
GUID0
Full ReferenceIzumi, A., Sato, H., Matsumura, H. (2001) Formation of high moisture and dopant diffusion resistivity silicon nitride films by catalytic-CVD method. Le Journal de Physique IV, 11. doi:10.1051/jp4:20013112
Plain TextIzumi, A., Sato, H., Matsumura, H. (2001) Formation of high moisture and dopant diffusion resistivity silicon nitride films by catalytic-CVD method. Le Journal de Physique IV, 11. doi:10.1051/jp4:20013112
In(n.d.) Le Journal de Physique IV Vol. 11. EDP Sciences

See Also

These are possibly similar items as determined by title/reference text matching only.

Hofstätter, M., Atakan, B., Kohse-Höinghaus, K. (2001) CVD growth of silicon films at high rates. Le Journal de Physique IV, 11. doi:10.1051/jp4:2001337
Glättli, H. (2001) La diffusion de neutrons aux petits angles. Le Journal de Physique IV, 11. doi:10.1051/jp4:2001902
HAMMADI, Z., LECOHIER, B., CROS, A., DALLAPORTA, H. (1993) Formation of CVD copper films investigated by surface analysis and reflectivity. Le Journal de Physique IV, 3. doi:10.1051/jp4:1993311
Deschanvres, J. L., Meffre, W. (2001) Erbium doped yttria thin films deposited by injection CVD. Le Journal de Physique IV, 11. doi:10.1051/jp4:20011153
He, L., Hitchman, M. L., Shamlian, S. H., Alexandrov, S. E. (2001) Organic chemistry by CVD. Le Journal de Physique IV, 11. doi:10.1051/jp4:2001333
Harsta, A. (2001) Halide CVD of dielectric and ferroelectric oxides. Le Journal de Physique IV, 11. doi:10.1051/jp4:2001328
Thévenin, P., Soltani, A., Bath, A. (2001) Synthesis of hexagonal boron nitride thin films by a plasma assisted chemical vapor deposition method. Le Journal de Physique IV, 11. doi:10.1051/jp4:20013101
Belmonte, T., Poussardin, J. Y., Lefèvre, L., Michel, H. (2001) Aluminium nitride synthesis by RPECVD. Le Journal de Physique IV, 11. doi:10.1051/jp4:2001395
ALEXANDROV, S. E., HITCHMAN, M. L., SHAMLIAN, S. (1993) A study of remote plasma enhanced CVD of silicon nitride films. Le Journal de Physique IV, 3. doi:10.1051/jp4:1993331
Kamlag, Y., Goossens, A., Colbeck, I., Schoonman, J. (2001) Formation of cubic SiC nanocrystals by laser-assisted CVD. Le Journal de Physique IV, 11. doi:10.1051/jp4:2001358
Mathur, S., Veith, M., Sivakov, V., Shen, H., Gao, H.-B. (2001) Composition, morphology and particle size control in nanocrystalline iron oxide films grown by single-source CVD. Le Journal de Physique IV, 11. doi:10.1051/jp4:2001362
 
and/or  
Mindat.org is an outreach project of the Hudson Institute of Mineralogy, a 501(c)(3) not-for-profit organization.
Copyright © mindat.org and the Hudson Institute of Mineralogy 1993-2025, except where stated. Most political location boundaries are © OpenStreetMap contributors. Mindat.org relies on the contributions of thousands of members and supporters. Founded in 2000 by Jolyon Ralph.
To cite: Ralph, J., Von Bargen, D., Martynov, P., Zhang, J., Que, X., Prabhu, A., Morrison, S. M., Li, W., Chen, W., & Ma, X. (2025). Mindat.org: The open access mineralogy database to accelerate data-intensive geoscience research. American Mineralogist, 110(6), 833–844. doi:10.2138/am-2024-9486.
Privacy Policy - Terms & Conditions - Contact Us / DMCA issues - Report a bug/vulnerability Current server date and time: August 22, 2025 17:04:26
Go to top of page