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HAMMADI, Z., LECOHIER, B., CROS, A., DALLAPORTA, H. (1993) Formation of CVD copper films investigated by surface analysis and reflectivity. Le Journal de Physique IV, 3. doi:10.1051/jp4:1993311

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Reference TypeJournal (article/letter/editorial)
TitleFormation of CVD copper films investigated by surface analysis and reflectivity
JournalLe Journal de Physique IV
AuthorsHAMMADI, Z.Author
LECOHIER, B.Author
CROS, A.Author
DALLAPORTA, H.Author
Year1993 (August)Volume3
PublisherEDP Sciences
DOIdoi:10.1051/jp4:1993311Search in ResearchGate
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Mindat Ref. ID10296021Long-form Identifiermindat:1:5:10296021:3
GUID0
Full ReferenceHAMMADI, Z., LECOHIER, B., CROS, A., DALLAPORTA, H. (1993) Formation of CVD copper films investigated by surface analysis and reflectivity. Le Journal de Physique IV, 3. doi:10.1051/jp4:1993311
Plain TextHAMMADI, Z., LECOHIER, B., CROS, A., DALLAPORTA, H. (1993) Formation of CVD copper films investigated by surface analysis and reflectivity. Le Journal de Physique IV, 3. doi:10.1051/jp4:1993311
In(n.d.) Le Journal de Physique IV Vol. 3. EDP Sciences


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