Voronina, Ekaterina N., Mankelevich, Yuri A., Rakhimova, Tatyana V., Palov, Alexander P., Lopaev, Dmitry V., Zyryanov, Sergey M., Zotovich, Alexey I., Baklanov, Mikhail R. (2017) Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κ films. The European Physical Journal D, 71. doi:10.1140/epjd/e2017-70618-8
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κ films | ||
| Journal | The European Physical Journal D | ||
| Authors | Voronina, Ekaterina N. | Author | |
| Mankelevich, Yuri A. | Author | ||
| Rakhimova, Tatyana V. | Author | ||
| Palov, Alexander P. | Author | ||
| Lopaev, Dmitry V. | Author | ||
| Zyryanov, Sergey M. | Author | ||
| Zotovich, Alexey I. | Author | ||
| Baklanov, Mikhail R. | Author | ||
| Year | 2017 (May) | Volume | 71 |
| Publisher | Springer Science and Business Media LLC | ||
| DOI | doi:10.1140/epjd/e2017-70618-8Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 10361930 | Long-form Identifier | mindat:1:5:10361930:1 |
| GUID | 0 | ||
| Full Reference | Voronina, Ekaterina N., Mankelevich, Yuri A., Rakhimova, Tatyana V., Palov, Alexander P., Lopaev, Dmitry V., Zyryanov, Sergey M., Zotovich, Alexey I., Baklanov, Mikhail R. (2017) Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κ films. The European Physical Journal D, 71. doi:10.1140/epjd/e2017-70618-8 | ||
| Plain Text | Voronina, Ekaterina N., Mankelevich, Yuri A., Rakhimova, Tatyana V., Palov, Alexander P., Lopaev, Dmitry V., Zyryanov, Sergey M., Zotovich, Alexey I., Baklanov, Mikhail R. (2017) Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κ films. The European Physical Journal D, 71. doi:10.1140/epjd/e2017-70618-8 | ||
| In | (n.d.) The European Physical Journal D Vol. 71. Springer Science and Business Media LLC | ||
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