Watch the Dallas Symposium LIVE, and fundraiser auction
Ticket proceeds support mindat.org! - click here...
Log InRegister
Quick Links : The Mindat ManualThe Rock H. Currier Digital LibraryMindat Newsletter [Free Download]
Home PageAbout MindatThe Mindat ManualHistory of MindatCopyright StatusWho We AreContact UsAdvertise on Mindat
Donate to MindatCorporate SponsorshipSponsor a PageSponsored PagesMindat AdvertisersAdvertise on Mindat
Learning CenterWhat is a mineral?The most common minerals on earthInformation for EducatorsMindat ArticlesThe ElementsThe Rock H. Currier Digital LibraryGeologic Time
Minerals by PropertiesMinerals by ChemistryAdvanced Locality SearchRandom MineralRandom LocalitySearch by minIDLocalities Near MeSearch ArticlesSearch GlossaryMore Search Options
Search For:
Mineral Name:
Locality Name:
Keyword(s):
 
The Mindat ManualAdd a New PhotoRate PhotosLocality Edit ReportCoordinate Completion ReportAdd Glossary Item
Mining CompaniesStatisticsUsersMineral MuseumsClubs & OrganizationsMineral Shows & EventsThe Mindat DirectoryDevice SettingsThe Mineral Quiz
Photo SearchPhoto GalleriesSearch by ColorNew Photos TodayNew Photos YesterdayMembers' Photo GalleriesPast Photo of the Day GalleryPhotography

Voronina, Ekaterina N., Mankelevich, Yuri A., Rakhimova, Tatyana V. (2017) Reactive pathways of hydrogen and carbon removal from organosilicate glass low-κ films by F atoms. The European Physical Journal D, 71. doi:10.1140/epjd/e2017-80136-4

Advanced
   -   Only viewable:
Reference TypeJournal (article/letter/editorial)
TitleReactive pathways of hydrogen and carbon removal from organosilicate glass low-κ films by F atoms
JournalThe European Physical Journal D
AuthorsVoronina, Ekaterina N.Author
Mankelevich, Yuri A.Author
Rakhimova, Tatyana V.Author
Year2017 (July)Volume71
PublisherSpringer Science and Business Media LLC
DOIdoi:10.1140/epjd/e2017-80136-4Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID10362018Long-form Identifiermindat:1:5:10362018:5
GUID0
Full ReferenceVoronina, Ekaterina N., Mankelevich, Yuri A., Rakhimova, Tatyana V. (2017) Reactive pathways of hydrogen and carbon removal from organosilicate glass low-κ films by F atoms. The European Physical Journal D, 71. doi:10.1140/epjd/e2017-80136-4
Plain TextVoronina, Ekaterina N., Mankelevich, Yuri A., Rakhimova, Tatyana V. (2017) Reactive pathways of hydrogen and carbon removal from organosilicate glass low-κ films by F atoms. The European Physical Journal D, 71. doi:10.1140/epjd/e2017-80136-4
In(n.d.) The European Physical Journal D Vol. 71. Springer Science and Business Media LLC

See Also

These are possibly similar items as determined by title/reference text matching only.

Voronina, Ekaterina N., Mankelevich, Yuri A., Rakhimova, Tatyana V., Palov, Alexander P., Lopaev, Dmitry V., Zyryanov, Sergey M., Zotovich, Alexey I., Baklanov, Mikhail R. (2017) Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κ films. The European Physical Journal D, 71. doi:10.1140/epjd/e2017-70618-8
Mankelevich, Yuri A., Voronina, Ekaterina N., Rakhimova, Tatyana V., Palov, Alexander P., Lopaev, Dmitry V., Zyryanov, Sergey M., Baklanov, Mikhail R. (2017) Fluorine atoms interaction with the nanoporous materials: experiment and DFT simulation. The European Physical Journal D, 71. doi:10.1140/epjd/e2017-70619-7
Mankelevich, Yuri A, Voronina, Ekaterina N, Rakhimova, Tatyana V, Palov, Alexander P, Lopaev, Dmitry V, Zyryanov, Sergey M, Baklanov, Mikhail R (2016) Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiOxfilms. Journal of Physics D: Applied Physics, 49. 345203pp. doi:10.1088/0022-3727/49/34/345203
Voronina, Ekaterina N, Mankelevich, Yuri A, Novikov, Lev S, Rakhimova, Tatyana V, Marinov, Daniil, de Marneffe, Jean-François (2020) Mechanisms of hydrogen atom interactions with MoS2 monolayer. Journal of Physics: Condensed Matter, 32 (44) 445003pp. doi:10.1088/1361-648x/aba013
Voloshin, Dmitry, Kovalev, Alexander, Mankelevich, Yuri, Proshina, Olga, Rakhimova, Tatyana, Vasilieva, Anna (2015) Evaluation of plasma density in RF CCP discharges from ion current to Langmuir probe: experiment and numerical simulation. The European Physical Journal D, 69. doi:10.1140/epjd/e2014-50313-2
Grum-Grzhimailo, Alexei N., Popov, Yuri V., Gryzlova, Elena V., Solov’yov, Andrey V. (2017) Many particle spectroscopy of atoms, molecules, clusters and surfaces: international conference MPS-2016. The European Physical Journal D, 71. doi:10.1140/epjd/e2017-80268-5
Maioli, Leticia S., Bettega, Márcio H. F. (2017) Low-energy-electron scattering by CH3CN. The European Physical Journal D, 71. doi:10.1140/epjd/e2017-80484-y
Ren, Xianghe, Tang, Jingjing, Yang, Qingbo, Zhang, Jingtao (2017) Ionization of hydrogen atom by n-cycle circularly polarized laser pulses. The European Physical Journal D, 71. doi:10.1140/epjd/e2017-80047-4
Belyaev, Andrey K., Yakovleva, Svetlana A., Kraemer, Wolfgang P. (2017) Inelastic processes in collisions of lithium positive ions with hydrogen anions and atoms. The European Physical Journal D, 71. doi:10.1140/epjd/e2017-80390-4
Romanenko, Victor I., Kornilovska, Nataliya V. (2017) Atoms in the counter-propagating frequency-modulated waves: splitting, cooling, confinement. The European Physical Journal D, 71. doi:10.1140/epjd/e2017-80109-7
Lopaev, D V, Zyryanov, S M, Zotovich, A I, Rakhimova, T V, Mankelevich, Yu A, Voronina, E N (2020) Damage to porous SiCOH low-k dielectrics by O, N and F atoms at lowered temperatures. Journal of Physics D: Applied Physics, 53. 175203pp. doi:10.1088/1361-6463/ab6e99
 
and/or  
Mindat.org is an outreach project of the Hudson Institute of Mineralogy, a 501(c)(3) not-for-profit organization.
Copyright © mindat.org and the Hudson Institute of Mineralogy 1993-2025, except where stated. Most political location boundaries are © OpenStreetMap contributors. Mindat.org relies on the contributions of thousands of members and supporters. Founded in 2000 by Jolyon Ralph.
To cite: Ralph, J., Von Bargen, D., Martynov, P., Zhang, J., Que, X., Prabhu, A., Morrison, S. M., Li, W., Chen, W., & Ma, X. (2025). Mindat.org: The open access mineralogy database to accelerate data-intensive geoscience research. American Mineralogist, 110(6), 833–844. doi:10.2138/am-2024-9486.
Privacy Policy - Terms & Conditions - Contact Us / DMCA issues - Report a bug/vulnerability Current server date and time: August 23, 2025 18:21:43
Go to top of page