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Voloshin, Dmitry, Kovalev, Alexander, Mankelevich, Yuri, Proshina, Olga, Rakhimova, Tatyana, Vasilieva, Anna (2015) Evaluation of plasma density in RF CCP discharges from ion current to Langmuir probe: experiment and numerical simulation. The European Physical Journal D, 69. doi:10.1140/epjd/e2014-50313-2

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Reference TypeJournal (article/letter/editorial)
TitleEvaluation of plasma density in RF CCP discharges from ion current to Langmuir probe: experiment and numerical simulation
JournalThe European Physical Journal D
AuthorsVoloshin, DmitryAuthor
Kovalev, AlexanderAuthor
Mankelevich, YuriAuthor
Proshina, OlgaAuthor
Rakhimova, TatyanaAuthor
Vasilieva, AnnaAuthor
Year2015 (January)Volume69
PublisherSpringer Science and Business Media LLC
DOIdoi:10.1140/epjd/e2014-50313-2Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID10361175Long-form Identifiermindat:1:5:10361175:6
GUID0
Full ReferenceVoloshin, Dmitry, Kovalev, Alexander, Mankelevich, Yuri, Proshina, Olga, Rakhimova, Tatyana, Vasilieva, Anna (2015) Evaluation of plasma density in RF CCP discharges from ion current to Langmuir probe: experiment and numerical simulation. The European Physical Journal D, 69. doi:10.1140/epjd/e2014-50313-2
Plain TextVoloshin, Dmitry, Kovalev, Alexander, Mankelevich, Yuri, Proshina, Olga, Rakhimova, Tatyana, Vasilieva, Anna (2015) Evaluation of plasma density in RF CCP discharges from ion current to Langmuir probe: experiment and numerical simulation. The European Physical Journal D, 69. doi:10.1140/epjd/e2014-50313-2
In(n.d.) The European Physical Journal D Vol. 69. Springer Science and Business Media LLC

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