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Lee, Min-Hyong, Choe, Ik-Jin, Chung, Chin-Wook (2007) New Method to Measure the Electron Temperature and the Plasma Density in a Single-Frequency Capacitive Discharge. Journal of the Korean Physical Society, 51 (4). 1307pp. doi:10.3938/jkps.51.1307

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Reference TypeJournal (article/letter/editorial)
TitleNew Method to Measure the Electron Temperature and the Plasma Density in a Single-Frequency Capacitive Discharge
JournalJournal of the Korean Physical Society
AuthorsLee, Min-HyongAuthor
Choe, Ik-JinAuthor
Chung, Chin-WookAuthor
Year2007 (October 15)Volume51
Issue4
PublisherKorean Physical Society
DOIdoi:10.3938/jkps.51.1307Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID11231966Long-form Identifiermindat:1:5:11231966:7
GUID0
Full ReferenceLee, Min-Hyong, Choe, Ik-Jin, Chung, Chin-Wook (2007) New Method to Measure the Electron Temperature and the Plasma Density in a Single-Frequency Capacitive Discharge. Journal of the Korean Physical Society, 51 (4). 1307pp. doi:10.3938/jkps.51.1307
Plain TextLee, Min-Hyong, Choe, Ik-Jin, Chung, Chin-Wook (2007) New Method to Measure the Electron Temperature and the Plasma Density in a Single-Frequency Capacitive Discharge. Journal of the Korean Physical Society, 51 (4). 1307pp. doi:10.3938/jkps.51.1307
In(2007, October) Journal of the Korean Physical Society Vol. 51 (4) Korean Physical Society

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Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook (2007) Noninvasive method to measure the ion flux in capacitive discharge. Applied Physics Letters, 91 (22). 221505pp. doi:10.1063/1.2815923
Lee, Young-Kwang, Hwang, Kwang-Tae, Lee, Min-Hyong, Chung, Chin-Wook (2008) Spectroscopic Measurement of the Electron Temperature and the Metastable Densities by Using a Simple Collisional-Radiative Model in a Low-Pressure Inductively-Coupled Argon Plasma. Journal of the Korean Physical Society, 52 (6). 1792-1799 doi:10.3938/jkps.52.1792
Lee, Ik Jae, Koo, Tae-Yeong, Yu, Chung-Jong (2007) Study on the PAL-XFEL Beamline. Journal of the Korean Physical Society, 51 (91). 438pp. doi:10.3938/jkps.51.438
Lee, Min-Hyong, Jang, Sung-Ho, Chung, Chin-Wook (2007) Floating probe for electron temperature and ion density measurement applicable to processing plasmas. Journal of Applied Physics, 101 (3). 33305pp. doi:10.1063/1.2204352
Lee, Seung-Su, Kim, Min-Joong, Chung, Chin-Wook, Song, Je-Boem, Oh, Seong-Geun, Kim, Jin-Tae, Chung, Nak-Kwan, Yun, Ju-Young (2019) Degradation Test for an Anodic Aluminum Oxide Film in Plasma Etching. Journal of the Korean Physical Society, 74 (11). 1046-1051 doi:10.3938/jkps.74.1046
Kim, Jung-Hyung, Seong, Dae-Jin, Shin, Yong-Hyeon (2007) Measurements of the Time Evolution of the Electron Density with a Cutoff Probe in a Pulsed RF Plasma. Journal of the Korean Physical Society, 51 (3). 963pp. doi:10.3938/jkps.51.963
Cheong, Yong Wook, Lee, Jinhyoung (2007) Generation of Entangled Coherent States. Journal of the Korean Physical Society, 51 (94). 1513pp. doi:10.3938/jkps.51.1513
Lee, Min-Hyong, Chung, Chin-Wook (2005) Effect of multistep ionizations on the electron temperature in an argon inductively coupled plasma. Applied Physics Letters, 87 (13). 131502pp. doi:10.1063/1.2056592
Lee, Jong-Chul, Boo, Jin-Hyo, Kim, Youn-Jea (2007) Changes of Electrical Conductivity and Temperature Caused by Electrode Erosion for Atmospheric Plasma Systems. Journal of the Korean Physical Society, 51 (3). 972pp. doi:10.3938/jkps.51.972
Joo, Sangrae, Lee, Hyewon, Lee, Kwang Soon (2007) Study of Silicon Oxidation in a Remote Plasma-Enhanced Rapid Thermal Processor. Journal of the Korean Physical Society, 51 (4). 1337pp. doi:10.3938/jkps.51.1337
Lee, Sungjun, Chung, Jin Wan, Lee, Woo Gab (2007) Adsorption Effect of Silicon Sorption Artifacts by Using an Ultra-Precision Balance in Vacuum. Journal of the Korean Physical Society, 51 (1). 266pp. doi:10.3938/jkps.51.266
 
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