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Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook (2007) Noninvasive method to measure the ion flux in capacitive discharge. Applied Physics Letters, 91 (22). 221505pp. doi:10.1063/1.2815923

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Reference TypeJournal (article/letter/editorial)
TitleNoninvasive method to measure the ion flux in capacitive discharge
JournalApplied Physics Letters
AuthorsLee, Min-HyongAuthor
Lee, Hyo-ChangAuthor
Chung, Chin-WookAuthor
Year2007 (November 26)Volume91
Issue22
PublisherAIP Publishing
DOIdoi:10.1063/1.2815923Search in ResearchGate
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Mindat Ref. ID8557979Long-form Identifiermindat:1:5:8557979:6
GUID0
Full ReferenceLee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook (2007) Noninvasive method to measure the ion flux in capacitive discharge. Applied Physics Letters, 91 (22). 221505pp. doi:10.1063/1.2815923
Plain TextLee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook (2007) Noninvasive method to measure the ion flux in capacitive discharge. Applied Physics Letters, 91 (22). 221505pp. doi:10.1063/1.2815923
In(2007, November) Applied Physics Letters Vol. 91 (22) AIP Publishing

See Also

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Lee, Hyo-Chang, Lee, Min-Hyong, Chung, Chin-Wook (2010) Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas. Applied Physics Letters, 96 (4). 41503pp. doi:10.1063/1.3291038
Lee, Min-Hyong, Choe, Ik-Jin, Chung, Chin-Wook (2007) New Method to Measure the Electron Temperature and the Plasma Density in a Single-Frequency Capacitive Discharge. Journal of the Korean Physical Society, 51 (4). 1307pp. doi:10.3938/jkps.51.1307
Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook (2008) Observation of collisionless heating of low energy electrons in low pressure inductively coupled argon plasmas. Applied Physics Letters, 93 (23). 231503pp. doi:10.1063/1.3042264
Lee, Hyo-Chang, Lee, Min-Hyong, Chung, Chin-Wook (2010) Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma. Applied Physics Letters, 96 (7). 71501pp. doi:10.1063/1.3293295
Lee, Min-Hyong, Lee, Kyeong Hyo, Hyun, Dong-Seok, Chung, Chin-Wook (2007) On the hysteresis in E to H and H to E transitions and the multistep ionization in inductively coupled plasma. Applied Physics Letters, 90 (19). 191502pp. doi:10.1063/1.2734501
Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook (2012) Effect of adding small amount of inductive fields to O2, Ar/O2 capacitively coupled plasmas. Journal of Applied Physics, 111 (9). 93301pp. doi:10.1063/1.4705362
Lee, Hyo-Chang, Chung, C.-W., Lee, M. H., Kim, J. H. (2021) Noninvasive method to measure the electron temperature in radio frequency capacitively coupled plasmas. Applied Physics Letters, 118 (20) 204101pp. doi:10.1063/5.0049186
Lee, Min-Hyong, Chung, Chin-Wook (2008) Observation of the inductive to helicon mode transition in a weakly magnetized solenoidal inductive discharge. Applied Physics Letters, 93 (15). 151503pp. doi:10.1063/1.2991292
Lee, Hyo-Chang, Kim, Dong-Hwan, Chung, Chin-Wook (2013) Discharge mode transition and hysteresis in inductively coupled plasma. Applied Physics Letters, 102 (23). 234104pp. doi:10.1063/1.4809925
Lee, Min-Hyong, Jang, Sung-Ho, Chung, Chin-Wook (2007) Floating probe for electron temperature and ion density measurement applicable to processing plasmas. Journal of Applied Physics, 101 (3). 33305pp. doi:10.1063/1.2204352
Lee, Hyo-Chang, Chung, Chin-Wook (2012) Collisionless electron heating by radio frequency bias in low gas pressure inductive discharge. Applied Physics Letters, 101 (24). 244104pp. doi:10.1063/1.4770312
 
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