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Lee, Hyo-Chang, Lee, Min-Hyong, Chung, Chin-Wook (2010) Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas. Applied Physics Letters, 96 (4). 41503pp. doi:10.1063/1.3291038

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Reference TypeJournal (article/letter/editorial)
TitleExperimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas
JournalApplied Physics Letters
AuthorsLee, Hyo-ChangAuthor
Lee, Min-HyongAuthor
Chung, Chin-WookAuthor
Year2010 (January 25)Volume96
Issue4
PublisherAIP Publishing
DOIdoi:10.1063/1.3291038Search in ResearchGate
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Mindat Ref. ID8584976Long-form Identifiermindat:1:5:8584976:5
GUID0
Full ReferenceLee, Hyo-Chang, Lee, Min-Hyong, Chung, Chin-Wook (2010) Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas. Applied Physics Letters, 96 (4). 41503pp. doi:10.1063/1.3291038
Plain TextLee, Hyo-Chang, Lee, Min-Hyong, Chung, Chin-Wook (2010) Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas. Applied Physics Letters, 96 (4). 41503pp. doi:10.1063/1.3291038
In(2010, January) Applied Physics Letters Vol. 96 (4) AIP Publishing

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Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook (2008) Observation of collisionless heating of low energy electrons in low pressure inductively coupled argon plasmas. Applied Physics Letters, 93 (23). 231503pp. doi:10.1063/1.3042264
Lee, Hyo-Chang, Lee, Min-Hyong, Chung, Chin-Wook (2010) Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma. Applied Physics Letters, 96 (7). 71501pp. doi:10.1063/1.3293295
Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook (2010) Comparison of pressure dependence of electron energy distributions in oxygen capacitively and inductively coupled plasmas. Physical Review E, 81 (4) doi:10.1103/physreve.81.046402
Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook (2012) Effect of adding small amount of inductive fields to O2, Ar/O2 capacitively coupled plasmas. Journal of Applied Physics, 111 (9). 93301pp. doi:10.1063/1.4705362
Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook (2007) Noninvasive method to measure the ion flux in capacitive discharge. Applied Physics Letters, 91 (22). 221505pp. doi:10.1063/1.2815923
Lee, Min-Hyong, Lee, Kyeong Hyo, Hyun, Dong-Seok, Chung, Chin-Wook (2007) On the hysteresis in E to H and H to E transitions and the multistep ionization in inductively coupled plasma. Applied Physics Letters, 90 (19). 191502pp. doi:10.1063/1.2734501
Lee, Min-Hyong, Chung, Chin-Wook (2005) Effect of multistep ionizations on the electron temperature in an argon inductively coupled plasma. Applied Physics Letters, 87 (13). 131502pp. doi:10.1063/1.2056592
Lee, Young-Kwang, Lee, Min-Hyong, Chung, Chin-Wook (2009) Experimental measurement of the total energy losses in a low pressure inductively coupled argon plasma. Applied Physics Letters, 95 (11). 111501pp. doi:10.1063/1.3097020
Lee, Hyo-Chang, Chung, Chin-Wook, Kim, J. H., Seong, D. J. (2019) Electron energy distribution modification by RF bias in Ar/SF6 inductively coupled plasmas. Applied Physics Letters, 115 (6). 64102pp. doi:10.1063/1.5110219
Lee, Hyo-Chang, Kim, Dong-Hwan, Chung, Chin-Wook (2013) Discharge mode transition and hysteresis in inductively coupled plasma. Applied Physics Letters, 102 (23). 234104pp. doi:10.1063/1.4809925
Lee, Min-Hyong, Chung, Chin-Wook (2008) Observation of the inductive to helicon mode transition in a weakly magnetized solenoidal inductive discharge. Applied Physics Letters, 93 (15). 151503pp. doi:10.1063/1.2991292
 
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