Watch the Dallas Symposium LIVE, and fundraiser auction
Ticket proceeds support mindat.org! - click here...
Log InRegister
Quick Links : The Mindat ManualThe Rock H. Currier Digital LibraryMindat Newsletter [Free Download]
Home PageAbout MindatThe Mindat ManualHistory of MindatCopyright StatusWho We AreContact UsAdvertise on Mindat
Donate to MindatCorporate SponsorshipSponsor a PageSponsored PagesMindat AdvertisersAdvertise on Mindat
Learning CenterWhat is a mineral?The most common minerals on earthInformation for EducatorsMindat ArticlesThe ElementsThe Rock H. Currier Digital LibraryGeologic Time
Minerals by PropertiesMinerals by ChemistryAdvanced Locality SearchRandom MineralRandom LocalitySearch by minIDLocalities Near MeSearch ArticlesSearch GlossaryMore Search Options
Search For:
Mineral Name:
Locality Name:
Keyword(s):
 
The Mindat ManualAdd a New PhotoRate PhotosLocality Edit ReportCoordinate Completion ReportAdd Glossary Item
Mining CompaniesStatisticsUsersMineral MuseumsClubs & OrganizationsMineral Shows & EventsThe Mindat DirectoryDevice SettingsThe Mineral Quiz
Photo SearchPhoto GalleriesSearch by ColorNew Photos TodayNew Photos YesterdayMembers' Photo GalleriesPast Photo of the Day GalleryPhotography

Lee, Hyo-Chang, Lee, Min-Hyong, Chung, Chin-Wook (2010) Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma. Applied Physics Letters, 96 (7). 71501pp. doi:10.1063/1.3293295

Advanced
   -   Only viewable:
Reference TypeJournal (article/letter/editorial)
TitleEffects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma
JournalApplied Physics Letters
AuthorsLee, Hyo-ChangAuthor
Lee, Min-HyongAuthor
Chung, Chin-WookAuthor
Year2010 (February 15)Volume96
Issue7
PublisherAIP Publishing
DOIdoi:10.1063/1.3293295Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID8585590Long-form Identifiermindat:1:5:8585590:6
GUID0
Full ReferenceLee, Hyo-Chang, Lee, Min-Hyong, Chung, Chin-Wook (2010) Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma. Applied Physics Letters, 96 (7). 71501pp. doi:10.1063/1.3293295
Plain TextLee, Hyo-Chang, Lee, Min-Hyong, Chung, Chin-Wook (2010) Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma. Applied Physics Letters, 96 (7). 71501pp. doi:10.1063/1.3293295
In(2010, February) Applied Physics Letters Vol. 96 (7) AIP Publishing

See Also

These are possibly similar items as determined by title/reference text matching only.

Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook (2008) Observation of collisionless heating of low energy electrons in low pressure inductively coupled argon plasmas. Applied Physics Letters, 93 (23). 231503pp. doi:10.1063/1.3042264
Lee, Hyo-Chang, Lee, Min-Hyong, Chung, Chin-Wook (2010) Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas. Applied Physics Letters, 96 (4). 41503pp. doi:10.1063/1.3291038
Lee, Young-Kwang, Lee, Min-Hyong, Chung, Chin-Wook (2009) Experimental measurement of the total energy losses in a low pressure inductively coupled argon plasma. Applied Physics Letters, 95 (11). 111501pp. doi:10.1063/1.3097020
Lee, Min-Hyong, Chung, Chin-Wook (2005) Effect of multistep ionizations on the electron temperature in an argon inductively coupled plasma. Applied Physics Letters, 87 (13). 131502pp. doi:10.1063/1.2056592
Lee, Min-Hyong, Lee, Kyeong Hyo, Hyun, Dong-Seok, Chung, Chin-Wook (2007) On the hysteresis in E to H and H to E transitions and the multistep ionization in inductively coupled plasma. Applied Physics Letters, 90 (19). 191502pp. doi:10.1063/1.2734501
Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook (2010) Comparison of pressure dependence of electron energy distributions in oxygen capacitively and inductively coupled plasmas. Physical Review E, 81 (4) doi:10.1103/physreve.81.046402
Lee, Hyo-Chang, Kim, Dong-Hwan, Chung, Chin-Wook (2013) Discharge mode transition and hysteresis in inductively coupled plasma. Applied Physics Letters, 102 (23). 234104pp. doi:10.1063/1.4809925
Lee, Hyo-Chang, Chung, Chin-Wook, Kim, J. H., Seong, D. J. (2019) Electron energy distribution modification by RF bias in Ar/SF6 inductively coupled plasmas. Applied Physics Letters, 115 (6). 64102pp. doi:10.1063/1.5110219
Lee, Hyo-Chang, Chung, Chin-Wook (2012) Collisionless electron heating by radio frequency bias in low gas pressure inductive discharge. Applied Physics Letters, 101 (24). 244104pp. doi:10.1063/1.4770312
Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook (2007) Noninvasive method to measure the ion flux in capacitive discharge. Applied Physics Letters, 91 (22). 221505pp. doi:10.1063/1.2815923
Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook (2012) Effect of adding small amount of inductive fields to O2, Ar/O2 capacitively coupled plasmas. Journal of Applied Physics, 111 (9). 93301pp. doi:10.1063/1.4705362
 
and/or  
Mindat.org is an outreach project of the Hudson Institute of Mineralogy, a 501(c)(3) not-for-profit organization.
Copyright © mindat.org and the Hudson Institute of Mineralogy 1993-2025, except where stated. Most political location boundaries are Β© OpenStreetMap contributors. Mindat.org relies on the contributions of thousands of members and supporters. Founded in 2000 by Jolyon Ralph.
To cite: Ralph, J., Von Bargen, D., Martynov, P., Zhang, J., Que, X., Prabhu, A., Morrison, S. M., Li, W., Chen, W., & Ma, X. (2025). Mindat.org: The open access mineralogy database to accelerate data-intensive geoscience research. American Mineralogist, 110(6), 833–844. doi:10.2138/am-2024-9486.
Privacy Policy - Terms & Conditions - Contact Us / DMCA issues - Report a bug/vulnerability Current server date and time: August 20, 2025 15:28:17
Go to top of page