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Munakata, Chusuke, Miyazaki, Masaru (1981) A Novel Method of Electron Beam Recording on a Si Wafer. Japanese Journal of Applied Physics, 20 (4) doi:10.1143/jjap.20.l293

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Reference TypeJournal (article/letter/editorial)
TitleA Novel Method of Electron Beam Recording on a Si Wafer
JournalJapanese Journal of Applied Physics
AuthorsMunakata, ChusukeAuthor
Miyazaki, MasaruAuthor
Year1981 (April)Volume20
Issue4
PublisherJapan Society of Applied Physics
DOIdoi:10.1143/jjap.20.l293Search in ResearchGate
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Mindat Ref. ID14984957Long-form Identifiermindat:1:5:14984957:1
GUID0
Full ReferenceMunakata, Chusuke, Miyazaki, Masaru (1981) A Novel Method of Electron Beam Recording on a Si Wafer. Japanese Journal of Applied Physics, 20 (4) doi:10.1143/jjap.20.l293
Plain TextMunakata, Chusuke, Miyazaki, Masaru (1981) A Novel Method of Electron Beam Recording on a Si Wafer. Japanese Journal of Applied Physics, 20 (4) doi:10.1143/jjap.20.l293
In(1981, April) Japanese Journal of Applied Physics Vol. 20 (4) Japan Society of Applied Physics

See Also

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Munakata, Chusuke, Honma, Noriaki (1981) Non-Destructive Method for Measuring Cut-Off Frequency of a p-n Junction with a Chopped Photon Beam. Japanese Journal of Applied Physics, 20 (12) doi:10.1143/jjap.20.l856
Munakata, Chusuke, Nanba, Mitsuo, Matsubara, Sunao (1981) Non-Destructive Method of Observing Inhomogeneities in p-n Junctions with a Chopped Photon Beam. Japanese Journal of Applied Physics, 20 (2) doi:10.1143/jjap.20.l137
Munakata, Chusuke (1965) Measurement of the Homogenity of a Semiconductor with an Electron Beam. Japanese Journal of Applied Physics, 4 (10) 815 doi:10.1143/jjap.4.815
Munakata, Chusuke (1967) An Electron Beam Method of Measuring Deffusion Voltage in Semiconductors. Japanese Journal of Applied Physics, 6 (2) 274 doi:10.1143/jjap.6.274
Munakata, Chusuke (1966) Detection of Resistivity Striations in a Ge Crystal with an Electron Beam. Japanese Journal of Applied Physics, 5 (4) 336 doi:10.1143/jjap.5.336
Munakata, Chusuke (1967) An Electron Beam Method of Measuring Resistivity Distribution in Semiconductors. Japanese Journal of Applied Physics, 6 (8) 963-971 doi:10.1143/jjap.6.963
Munakata, Chusuke (1967) Measurement of Potential Distribution in a Semiconductor Crystal with an Electron Beam. Japanese Journal of Applied Physics, 6 (4) 548-549 doi:10.1143/jjap.6.548
Saitou, Norio, Munakata, Chusuke, Maekawa, Akiji (1971) Analysis of Trapezoid Distortion due to Charge-Up in Electron Beam Recording. Japanese Journal of Applied Physics, 10 (3) 351-356 doi:10.1143/jjap.10.351
Watanabe, Hiroshi, Munakata, Chusuke (1965) Measurement of Resistance by Means of Electron Beam-I-. Japanese Journal of Applied Physics, 4 (4) 250-258 doi:10.1143/jjap.4.250
Munakata, Chusuke (1965) Bulk Electron Voltaic Effect. Japanese Journal of Applied Physics, 4 (9) 697 doi:10.1143/jjap.4.697
Munakata, Chusuke, Okazaki, Shinji, Yagi, Kunihiro (1982) Electron Beam Enhanced Surface Photovoltage. Japanese Journal of Applied Physics, 21. doi:10.1143/jjap.21.l555
 
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