Huang, Szuyu; Liu, Fachen; Mao, Ruilin; Guo, Qi; Li, Sheng; Sun, Fangyuan; Wang, Zhenzhong; Gao, Peng (2025) Direct Wafer Bonding of Silicon Carbide and Copper. ACS Applied Materials & Interfaces, 17 (19). doi:10.1021/acsami.5c00949
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Direct Wafer Bonding of Silicon Carbide and Copper | ||
Journal | ACS Applied Materials & Interfaces | ||
Authors | Huang, Szuyu | Author | |
Liu, Fachen | Author | ||
Mao, Ruilin | Author | ||
Guo, Qi | Author | ||
Li, Sheng | Author | ||
Sun, Fangyuan | Author | ||
Wang, Zhenzhong | Author | ||
Gao, Peng | Author | ||
Year | 2025 (May 14) | Volume | 17 |
Issue | 19 | ||
Publisher | American Chemical Society (ACS) | ||
DOI | doi:10.1021/acsami.5c00949Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 18447097 | Long-form Identifier | mindat:1:5:18447097:6 |
GUID | 0 | ||
Full Reference | Huang, Szuyu; Liu, Fachen; Mao, Ruilin; Guo, Qi; Li, Sheng; Sun, Fangyuan; Wang, Zhenzhong; Gao, Peng (2025) Direct Wafer Bonding of Silicon Carbide and Copper. ACS Applied Materials & Interfaces, 17 (19). doi:10.1021/acsami.5c00949 | ||
Plain Text | Huang, Szuyu; Liu, Fachen; Mao, Ruilin; Guo, Qi; Li, Sheng; Sun, Fangyuan; Wang, Zhenzhong; Gao, Peng (2025) Direct Wafer Bonding of Silicon Carbide and Copper. ACS Applied Materials & Interfaces, 17 (19). doi:10.1021/acsami.5c00949 | ||
In | (2025, May) ACS Applied Materials & Interfaces Vol. 17 (19). American Chemical Society (ACS) |
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