Popovici, Mihaela, Groven, Benjamin, Marcoen, Kristof, Phung, Quan Manh, Dutta, Shibesh, Swerts, Johan, Meersschaut, Johan, van den Berg, Jaap A., Franquet, Alexis, Moussa, Alain, Vanstreels, Kris, Lagrain, Pieter, Bender, Hugo, Jurczak, Malgorzata, Van Elshocht, Sven, Delabie, Annelies, Adelmann, Christoph (2017) Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties. Chemistry of Materials, 29. 4654-4666 doi:10.1021/acs.chemmater.6b05437

See Also

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	Popovici, Mihaela, Tomida, Kazuyuki, Swerts, Johan, Favia, Paola, Delabie, Annelies, Bender, Hugo, Adelmann, Christoph, Tielens, Hilde, Brijs, Bert, Kaczer, Ben, Pawlak, Malgorzata A., Kim, Min-Soo, Altimime, Laith, Van Elshocht, Sven, Kittl, Jorge A. (2011) A comparative study of the microstructure-dielectric properties of crystalline SrTiO3 ALD films obtained via seed layer approach. physica status solidi (a), 208 (8). 1920-1924 doi:10.1002/pssa.201026710
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	Phung, Quan Manh, Pourtois, Geoffrey, Swerts, Johan, Pierloot, Kristine, Delabie, Annelies (2015) Atomic Layer Deposition of Ruthenium on Ruthenium Surfaces: A Theoretical Study. The Journal of Physical Chemistry C, 119 (12). 6592-6603 doi:10.1021/jp5125958
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