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Suzuki, C., Sasaki, K., Kadota, K. (1997) Spatial and temporal variations of CF and CF2 radical densities in high-density CF4 plasmas studied by laser-induced fluorescence. Journal of Applied Physics, 82 (11). 5321-5326 doi:10.1063/1.366298

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Reference TypeJournal (article/letter/editorial)
TitleSpatial and temporal variations of CF and CF2 radical densities in high-density CF4 plasmas studied by laser-induced fluorescence
JournalJournal of Applied Physics
AuthorsSuzuki, C.Author
Sasaki, K.Author
Kadota, K.Author
Year1997 (December)Volume82
Issue11
PublisherAIP Publishing
DOIdoi:10.1063/1.366298Search in ResearchGate
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Mindat Ref. ID5087449Long-form Identifiermindat:1:5:5087449:5
GUID0
Full ReferenceSuzuki, C., Sasaki, K., Kadota, K. (1997) Spatial and temporal variations of CF and CF2 radical densities in high-density CF4 plasmas studied by laser-induced fluorescence. Journal of Applied Physics, 82 (11). 5321-5326 doi:10.1063/1.366298
Plain TextSuzuki, C., Sasaki, K., Kadota, K. (1997) Spatial and temporal variations of CF and CF2 radical densities in high-density CF4 plasmas studied by laser-induced fluorescence. Journal of Applied Physics, 82 (11). 5321-5326 doi:10.1063/1.366298
In(1997, December) Journal of Applied Physics Vol. 82 (11) AIP Publishing

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Sasaki, K., Furukawa, H., Kadota, K., Suzuki, C. (2000) Surface production of CF, CF2, and C2 radicals in high-density CF4/H2 plasmas. Journal of Applied Physics, 88 (10). 5585-5591 doi:10.1063/1.1319974
Suzuki, Chihiro, Kadota, Kiyoshi (1995) Spaceā€ and timeā€resolved measurements of CF and CF2 radicals in high density CF4 plasmas by laserā€induced fluorescence. Applied Physics Letters, 67 (17). 2569-2571 doi:10.1063/1.114435
Takizawa, K., Sasaki, K., Kadota, K. (2000) Characteristics of C3 radicals in high-density C4F8 plasmas studied by laser-induced fluorescence spectroscopy. Journal of Applied Physics, 88 (11). 6201-6206 doi:10.1063/1.1321029
Sasaki, K., Kawai, Y., Suzuki, C., Kadota, K. (1997) Kinetics of fluorine atoms in high-density carbonā€“tetrafluoride plasmas. Journal of Applied Physics, 82 (12). 5938-5943 doi:10.1063/1.366495
Sasaki, K., Matsui, S., Ito, H., Kadota, K. (2002) Dynamics of laser-ablation Ti plasmas studied by laser-induced fluorescence imaging spectroscopy. Journal of Applied Physics, 92 (11). 6471-6476 doi:10.1063/1.1518135
Sasaki, K., Okamoto, M. (2003) Kinetics of hydrogen atoms in high-density CF4/H2 plasmas studied by (2+1)-photon laser-induced fluorescence spectroscopy. Applied Physics Letters, 83 (10). 1935-1937 doi:10.1063/1.1609244
Sasaki, K., Wakasaki, T., Matsui, S., Kadota, K. (2002) Distributions of C2 and C3 radical densities in laser-ablation carbon plumes measured by laser-induced fluorescence imaging spectroscopy. Journal of Applied Physics, 91 (7). 4033-4039 doi:10.1063/1.1455151
Suzuki, Chihiro, Sasaki, Koichi, Kadota, Kiyoshi (1999) Formation of C2Radicals in High-Density C4F8Plasmas Studied by Laser-Induced Fluorescence. Japanese Journal of Applied Physics, 38. 6896-6901 doi:10.1143/jjap.38.6896
Sasaki, K., Kawai, Y., Suzuki, C., Kadota, K. (1998) Absolute density and reaction kinetics of fluorine atoms in high-density c-C4F8 plasmas. Journal of Applied Physics, 83 (12). 7482-7487 doi:10.1063/1.367511
Suzuki, Chihiro, Sasaki, Koichi, Kadota, Kiyoshi (1997) Loss Processes of CF and CF$_{\bf 2}$ Radicals in the Afterglow of High-Density CF$_{\bf 4}$ Plasmas. Japanese Journal of Applied Physics, 36. doi:10.1143/jjap.36.l824
Sasaki, K., Nakamoto, M., Kadota, K. (2001) A measurement method of absolute hydrogen atom density in plasmas by (2+1)-photon laser-induced fluorescence spectroscopy. Review of Scientific Instruments, 72 (5). 2298-2304 doi:10.1063/1.1367356
 
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