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Sasaki, K., Kawai, Y., Suzuki, C., Kadota, K. (1997) Kinetics of fluorine atoms in high-density carbon–tetrafluoride plasmas. Journal of Applied Physics, 82 (12). 5938-5943 doi:10.1063/1.366495

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Reference TypeJournal (article/letter/editorial)
TitleKinetics of fluorine atoms in high-density carbon–tetrafluoride plasmas
JournalJournal of Applied Physics
AuthorsSasaki, K.Author
Kawai, Y.Author
Suzuki, C.Author
Kadota, K.Author
Year1997 (December 15)Volume82
Issue12
PublisherAIP Publishing
DOIdoi:10.1063/1.366495Search in ResearchGate
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Mindat Ref. ID5087667Long-form Identifiermindat:1:5:5087667:9
GUID0
Full ReferenceSasaki, K., Kawai, Y., Suzuki, C., Kadota, K. (1997) Kinetics of fluorine atoms in high-density carbon–tetrafluoride plasmas. Journal of Applied Physics, 82 (12). 5938-5943 doi:10.1063/1.366495
Plain TextSasaki, K., Kawai, Y., Suzuki, C., Kadota, K. (1997) Kinetics of fluorine atoms in high-density carbon–tetrafluoride plasmas. Journal of Applied Physics, 82 (12). 5938-5943 doi:10.1063/1.366495
In(1997, December) Journal of Applied Physics Vol. 82 (12) AIP Publishing

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Sasaki, K., Kawai, Y., Suzuki, C., Kadota, K. (1998) Absolute density and reaction kinetics of fluorine atoms in high-density c-C4F8 plasmas. Journal of Applied Physics, 83 (12). 7482-7487 doi:10.1063/1.367511
Sasaki, K., Kawai, Y., Kadota, K. (1997) Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas. Applied Physics Letters, 70 (11). 1375-1377 doi:10.1063/1.118582
Suzuki, C., Sasaki, K., Kadota, K. (1997) Spatial and temporal variations of CF and CF2 radical densities in high-density CF4 plasmas studied by laser-induced fluorescence. Journal of Applied Physics, 82 (11). 5321-5326 doi:10.1063/1.366298
Sasaki, K., Furukawa, H., Kadota, K., Suzuki, C. (2000) Surface production of CF, CF2, and C2 radicals in high-density CF4/H2 plasmas. Journal of Applied Physics, 88 (10). 5585-5591 doi:10.1063/1.1319974
Sasaki, K., Kawai, Y., Kadota, K. (1999) Determination of fluorine atom density in reactive plasmas by vacuum ultraviolet absorption spectroscopy at 95.85 nm. Review of Scientific Instruments, 70 (1). 76-81 doi:10.1063/1.1149543
Suzuki, Chihiro, Sasaki, Koichi, Kadota, Kiyoshi (1998) Surface Kinetics of CFxRadicals and Fluorine Atoms in the Afterglow of High-Density C4F8Plasmas. Japanese Journal of Applied Physics, 37. 5763-5766 doi:10.1143/jjap.37.5763
Takizawa, K., Sasaki, K., Kadota, K. (2000) Characteristics of C3 radicals in high-density C4F8 plasmas studied by laser-induced fluorescence spectroscopy. Journal of Applied Physics, 88 (11). 6201-6206 doi:10.1063/1.1321029
Matsushita, Jun, Sasaki, Koichi, Kadota, Kiyoshi (1997) Dynamic Variation of the Sticking Coefficient of Oxygen Atoms in Helicon-Wave Excited High-Density Oxygen Plasmas. Japanese Journal of Applied Physics, 36. 4747-4751 doi:10.1143/jjap.36.4747
Suzuki, Chihiro, Sasaki, Koichi, Kadota, Kiyoshi (1997) Loss Processes of CF and CF$_{\bf 2}$ Radicals in the Afterglow of High-Density CF$_{\bf 4}$ Plasmas. Japanese Journal of Applied Physics, 36. doi:10.1143/jjap.36.l824
Sasaki, K., Okamoto, M. (2003) Kinetics of hydrogen atoms in high-density CF4/H2 plasmas studied by (2+1)-photon laser-induced fluorescence spectroscopy. Applied Physics Letters, 83 (10). 1935-1937 doi:10.1063/1.1609244
Kawai, Yozo, Sasaki, Koichi, Kadota, Kiyoshi (1997) Comparison of the Fluorine Atom Density Measured by Actinometry and Vacuum Ultraviolet Absorption Spectroscopy. Japanese Journal of Applied Physics, 36. doi:10.1143/jjap.36.l1261
 
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