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Hertl, Michael, Jolly, Jacques, Baravian, Gérard (2002) Detection of hydrogen atoms in SiH4–H2 radio-frequency plasmas using two-photon laser-induced fluorescence. Journal of Applied Physics, 92 (2). 710-715 doi:10.1063/1.1486033

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Reference TypeJournal (article/letter/editorial)
TitleDetection of hydrogen atoms in SiH4–H2 radio-frequency plasmas using two-photon laser-induced fluorescence
JournalJournal of Applied Physics
AuthorsHertl, MichaelAuthor
Jolly, JacquesAuthor
Baravian, GérardAuthor
Year2002 (July 15)Volume92
Issue2
PublisherAIP Publishing
DOIdoi:10.1063/1.1486033Search in ResearchGate
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Mindat Ref. ID5115919Long-form Identifiermindat:1:5:5115919:9
GUID0
Full ReferenceHertl, Michael, Jolly, Jacques, Baravian, Gérard (2002) Detection of hydrogen atoms in SiH4–H2 radio-frequency plasmas using two-photon laser-induced fluorescence. Journal of Applied Physics, 92 (2). 710-715 doi:10.1063/1.1486033
Plain TextHertl, Michael, Jolly, Jacques, Baravian, Gérard (2002) Detection of hydrogen atoms in SiH4–H2 radio-frequency plasmas using two-photon laser-induced fluorescence. Journal of Applied Physics, 92 (2). 710-715 doi:10.1063/1.1486033
In(2002, July) Journal of Applied Physics Vol. 92 (2) AIP Publishing

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Hertl, Michael, Jolly, Jacques (2000) Laser-induced fluorescence detection and kinetics of SiH2radicals in Ar/H2/SiH4RF discharges. Journal of Physics D: Applied Physics, 33. 381-388 doi:10.1088/0022-3727/33/4/311
Amorim, J., Baravian, G., Touzeau, M., Jolly, J. (1994) Two‐photon laser induced fluorescence and amplified spontaneous emission atom concentration measurements in O2and H2discharges. Journal of Applied Physics, 76 (3). 1487-1493 doi:10.1063/1.357723
Sasaki, K., Okamoto, M. (2003) Kinetics of hydrogen atoms in high-density CF4/H2 plasmas studied by (2+1)-photon laser-induced fluorescence spectroscopy. Applied Physics Letters, 83 (10). 1935-1937 doi:10.1063/1.1609244
Selwyn, Gary S. (1986) Spatially resolved detection of O atoms in etching plasmas by two‐photon laser‐induced fluorescence. Journal of Applied Physics, 60 (8). 2771-2774 doi:10.1063/1.337109
Horvath, P., Rozsa, K., Gallagher, A. (2004) Production of higher silanes in radio frequency SiH4 and H2-SiH4 plasmas. Journal of Applied Physics, 96 (12). 7660-7664 doi:10.1063/1.1786666
Tserepi, Angeliki D., Miller, Terry A. (1994) Two‐photon absorption laser‐induced fluorescence of H atoms: A probe for heterogeneous processes in hydrogen plasmas. Journal of Applied Physics, 75 (11). 7231-7236 doi:10.1063/1.356680
Amorim, J, Baravian, G, Jolly, J (2000) Laser-induced resonance fluorescence as a diagnostic technique in non-thermal equilibrium plasmas. Journal of Physics D: Applied Physics, 33. doi:10.1088/0022-3727/33/9/201
Sultan, G., Baravian, G., Jolly, J. (1990) Resonant three-photon ionization and two-photon laser-induced fluorescence of atomic oxygen in a discharge and post-discharge. Chemical Physics Letters, 175. 37-42 doi:10.1016/0009-2614(90)85514-d
Chérigier, L., Czarnetzki, U., Luggenhölscher, D., Schulz-von der Gathen, V., Döbele, H. F. (1999) Absolute atomic hydrogen densities in a radio frequency discharge measured by two-photon laser induced fluorescence imaging. Journal of Applied Physics, 85 (2). 696-702 doi:10.1063/1.369149
Jolly, J., Booth, J.-P. (2005) Atomic hydrogen densities in capacitively coupled very high-frequency plasmas in H2: Effect of excitation frequency. Journal of Applied Physics, 97 (10). 103305pp. doi:10.1063/1.1900290
Park, Won Zoo, Tanigawa, Manabu, Kajiwara, Toshinori, Muraoka, Katsunori, Masuda, Mitsuharu, Okada, Tatsuo, Maeda, Mitsuo, Suzuki, Atsushi, Matsuda, Akihisa (1992) Effect of Laser-Induced Dissociation during Measurements of Hydrogen Atoms in Silane Plasmas Using Two-Photon-Excited Laser-Induced Fluorescence. Japanese Journal of Applied Physics, 31. 2917-2918 doi:10.1143/jjap.31.2917
 
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