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Liniger, E. G., Simonyi, E. E. (2004) Moisture-driven crack growth in blanket low dielectric constant and ultralow dielectric constant films. Journal of Applied Physics, 96 (6). 3482-3485 doi:10.1063/1.1774269

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Reference TypeJournal (article/letter/editorial)
TitleMoisture-driven crack growth in blanket low dielectric constant and ultralow dielectric constant films
JournalJournal of Applied Physics
AuthorsLiniger, E. G.Author
Simonyi, E. E.Author
Year2004 (September 15)Volume96
Issue6
PublisherAIP Publishing
DOIdoi:10.1063/1.1774269Search in ResearchGate
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Mindat Ref. ID5129097Long-form Identifiermindat:1:5:5129097:3
GUID0
Full ReferenceLiniger, E. G., Simonyi, E. E. (2004) Moisture-driven crack growth in blanket low dielectric constant and ultralow dielectric constant films. Journal of Applied Physics, 96 (6). 3482-3485 doi:10.1063/1.1774269
Plain TextLiniger, E. G., Simonyi, E. E. (2004) Moisture-driven crack growth in blanket low dielectric constant and ultralow dielectric constant films. Journal of Applied Physics, 96 (6). 3482-3485 doi:10.1063/1.1774269
In(2004, September) Journal of Applied Physics Vol. 96 (6) AIP Publishing

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