Maeda, Tatsuro, Yasuda, Tetsuji, Nishizawa, Masayasu, Miyata, Noriyuki, Morita, Yukinori, Takagi, Shinichi (2006) Pure germanium nitride formation by atomic nitrogen radicals for application to Ge metal-insulator-semiconductor structures. Journal of Applied Physics, 100 (1). 14101pp. doi:10.1063/1.2206395
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Pure germanium nitride formation by atomic nitrogen radicals for application to Ge metal-insulator-semiconductor structures | ||
| Journal | Journal of Applied Physics | ||
| Authors | Maeda, Tatsuro | Author | |
| Yasuda, Tetsuji | Author | ||
| Nishizawa, Masayasu | Author | ||
| Miyata, Noriyuki | Author | ||
| Morita, Yukinori | Author | ||
| Takagi, Shinichi | Author | ||
| Year | 2006 (July) | Volume | 100 |
| Issue | 1 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.2206395Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5141337 | Long-form Identifier | mindat:1:5:5141337:0 |
| GUID | 0 | ||
| Full Reference | Maeda, Tatsuro, Yasuda, Tetsuji, Nishizawa, Masayasu, Miyata, Noriyuki, Morita, Yukinori, Takagi, Shinichi (2006) Pure germanium nitride formation by atomic nitrogen radicals for application to Ge metal-insulator-semiconductor structures. Journal of Applied Physics, 100 (1). 14101pp. doi:10.1063/1.2206395 | ||
| Plain Text | Maeda, Tatsuro, Yasuda, Tetsuji, Nishizawa, Masayasu, Miyata, Noriyuki, Morita, Yukinori, Takagi, Shinichi (2006) Pure germanium nitride formation by atomic nitrogen radicals for application to Ge metal-insulator-semiconductor structures. Journal of Applied Physics, 100 (1). 14101pp. doi:10.1063/1.2206395 | ||
| In | (2006, July) Journal of Applied Physics Vol. 100 (1) AIP Publishing | ||
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