Fenning, D. P., Zuschlag, A. S., Bertoni, M. I., Lai, B., Hahn, G., Buonassisi, T. (2013) Improved iron gettering of contaminated multicrystalline silicon by high-temperature phosphorus diffusion. Journal of Applied Physics, 113 (21). 214504pp. doi:10.1063/1.4808310
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Improved iron gettering of contaminated multicrystalline silicon by high-temperature phosphorus diffusion | ||
Journal | Journal of Applied Physics | ||
Authors | Fenning, D. P. | Author | |
Zuschlag, A. S. | Author | ||
Bertoni, M. I. | Author | ||
Lai, B. | Author | ||
Hahn, G. | Author | ||
Buonassisi, T. | Author | ||
Year | 2013 (June 7) | Volume | 113 |
Issue | 21 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.4808310Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5193103 | Long-form Identifier | mindat:1:5:5193103:4 |
GUID | 0 | ||
Full Reference | Fenning, D. P., Zuschlag, A. S., Bertoni, M. I., Lai, B., Hahn, G., Buonassisi, T. (2013) Improved iron gettering of contaminated multicrystalline silicon by high-temperature phosphorus diffusion. Journal of Applied Physics, 113 (21). 214504pp. doi:10.1063/1.4808310 | ||
Plain Text | Fenning, D. P., Zuschlag, A. S., Bertoni, M. I., Lai, B., Hahn, G., Buonassisi, T. (2013) Improved iron gettering of contaminated multicrystalline silicon by high-temperature phosphorus diffusion. Journal of Applied Physics, 113 (21). 214504pp. doi:10.1063/1.4808310 | ||
In | (2013, June) Journal of Applied Physics Vol. 113 (21) AIP Publishing |
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