Reference Type | Journal (article/letter/editorial) |
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Title | Surface stress variation as a function of applied compressive stress and temperature in microscale silicon |
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Journal | Journal of Applied Physics |
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Authors | Gan, Ming | Author |
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Tomar, Vikas | Author |
Year | 2014 (August 21) | Volume | 116 |
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Issue | 7 |
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Publisher | AIP Publishing |
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DOI | doi:10.1063/1.4892623Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 5200238 | Long-form Identifier | mindat:1:5:5200238:4 |
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GUID | 0 |
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Full Reference | Gan, Ming, Tomar, Vikas (2014) Surface stress variation as a function of applied compressive stress and temperature in microscale silicon. Journal of Applied Physics, 116 (7). 73502pp. doi:10.1063/1.4892623 |
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Plain Text | Gan, Ming, Tomar, Vikas (2014) Surface stress variation as a function of applied compressive stress and temperature in microscale silicon. Journal of Applied Physics, 116 (7). 73502pp. doi:10.1063/1.4892623 |
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In | (2014, August) Journal of Applied Physics Vol. 116 (7) AIP Publishing |
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