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Cantas, Ayten, Aygun, Gulnur, Basa, Deepak Kumar (2014) In-situ spectroscopic ellipsometry and structural study of HfO2 thin films deposited by radio frequency magnetron sputtering. Journal of Applied Physics, 116 (8). 83517pp. doi:10.1063/1.4893708

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Reference TypeJournal (article/letter/editorial)
TitleIn-situ spectroscopic ellipsometry and structural study of HfO2 thin films deposited by radio frequency magnetron sputtering
JournalJournal of Applied Physics
AuthorsCantas, AytenAuthor
Aygun, GulnurAuthor
Basa, Deepak KumarAuthor
Year2014 (August 28)Volume116
Issue8
PublisherAIP Publishing
DOIdoi:10.1063/1.4893708Search in ResearchGate
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Mindat Ref. ID5200326Long-form Identifiermindat:1:5:5200326:8
GUID0
Full ReferenceCantas, Ayten, Aygun, Gulnur, Basa, Deepak Kumar (2014) In-situ spectroscopic ellipsometry and structural study of HfO2 thin films deposited by radio frequency magnetron sputtering. Journal of Applied Physics, 116 (8). 83517pp. doi:10.1063/1.4893708
Plain TextCantas, Ayten, Aygun, Gulnur, Basa, Deepak Kumar (2014) In-situ spectroscopic ellipsometry and structural study of HfO2 thin films deposited by radio frequency magnetron sputtering. Journal of Applied Physics, 116 (8). 83517pp. doi:10.1063/1.4893708
In(2014, August) Journal of Applied Physics Vol. 116 (8) AIP Publishing

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Choi, K.H., Kang, H.C. (2014) Structural and optical evolution of Ga2O3/glass thin films deposited by radio frequency magnetron sputtering. Materials Letters, 123. 160-164 doi:10.1016/j.matlet.2014.03.038
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Cho, Shinho (2020) Structural and Optical Properties of Sm-doped BaMoO4 Phosphor Thin Films Deposited by Radio-Frequency Magnetron Sputtering. Journal of the Korean Physical Society, 76 (8) 745-749 doi:10.3938/jkps.76.745
Cantas, A., Aygun, G., Turan, R. (2014) Impact of incorporated oxygen quantity on optical, structural and dielectric properties of reactive magnetron sputter grown high-κ HfO2/Hf/Si thin film. Applied Surface Science, 318. 199-205 doi:10.1016/j.apsusc.2014.03.077
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