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Xu, C.L., Zhang, C.H., Li, J.J., Zhang, L.Q., Yang, Y.T., Song, Y., Jia, X.J., Li, J.Y., Chen, K.Q. (2012) A HRXRD and nano-indentation study on Ne-implanted 6H–SiC. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 286. 129-133 doi:10.1016/j.nimb.2012.01.009

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Reference TypeJournal (article/letter/editorial)
TitleA HRXRD and nano-indentation study on Ne-implanted 6H–SiC
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsXu, C.L.Author
Zhang, C.H.Author
Li, J.J.Author
Zhang, L.Q.Author
Yang, Y.T.Author
Song, Y.Author
Jia, X.J.Author
Li, J.Y.Author
Chen, K.Q.Author
Year2012 (September)Volume286
PublisherElsevier BV
DOIdoi:10.1016/j.nimb.2012.01.009Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5646502Long-form Identifiermindat:1:5:5646502:2
GUID0
Full ReferenceXu, C.L., Zhang, C.H., Li, J.J., Zhang, L.Q., Yang, Y.T., Song, Y., Jia, X.J., Li, J.Y., Chen, K.Q. (2012) A HRXRD and nano-indentation study on Ne-implanted 6H–SiC. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 286. 129-133 doi:10.1016/j.nimb.2012.01.009
Plain TextXu, C.L., Zhang, C.H., Li, J.J., Zhang, L.Q., Yang, Y.T., Song, Y., Jia, X.J., Li, J.Y., Chen, K.Q. (2012) A HRXRD and nano-indentation study on Ne-implanted 6H–SiC. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 286. 129-133 doi:10.1016/j.nimb.2012.01.009
In(2012) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 286. Elsevier BV

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