| Reference Type | Journal (article/letter/editorial) |
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| Title | Mechanism of amorphous Ge2Sb2Te5removal during chemical mechanical planarization in acidic H2O2slurry |
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| Journal | Chinese Physics B |
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| Authors | He, Ao-Dong | Author |
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| Song, Zhi-Tang | Author |
| Liu, Bo | Author |
| Zhong, Min | Author |
| Wang, Liang-Yong | Author |
| Lü, Ye-Gang | Author |
| Feng, Song-Lin | Author |
| Year | 2013 (January) | Volume | 22 |
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| Publisher | IOP Publishing |
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| DOI | doi:10.1088/1674-1056/22/1/018503Search in ResearchGate |
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| Generate Citation Formats |
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| Mindat Ref. ID | 6003032 | Long-form Identifier | mindat:1:5:6003032:8 |
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|
| GUID | 0 |
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| Full Reference | He, Ao-Dong, Song, Zhi-Tang, Liu, Bo, Zhong, Min, Wang, Liang-Yong, Lü, Ye-Gang, Feng, Song-Lin (2013) Mechanism of amorphous Ge2Sb2Te5removal during chemical mechanical planarization in acidic H2O2slurry. Chinese Physics B, 22. 18503pp. doi:10.1088/1674-1056/22/1/018503 |
|---|
| Plain Text | He, Ao-Dong, Song, Zhi-Tang, Liu, Bo, Zhong, Min, Wang, Liang-Yong, Lü, Ye-Gang, Feng, Song-Lin (2013) Mechanism of amorphous Ge2Sb2Te5removal during chemical mechanical planarization in acidic H2O2slurry. Chinese Physics B, 22. 18503pp. doi:10.1088/1674-1056/22/1/018503 |
|---|
| In | (n.d.) Chinese Physics B Vol. 22. IOP Publishing |
|---|
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