He, Ao-Dong, Liu, Bo, Song, Zhi-Tang, Wang, Liang-Yong, Liu, Wei-Li, Feng, Gao-Ming, Feng, Song-Lin (2014) Chemical mechanical planarization of Ge 2 Sb 2 Te 5 using IC1010 and Politex reg pads in acidic slurry. Chinese Physics B, 23. 88502pp. doi:10.1088/1674-1056/23/8/088502
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Chemical mechanical planarization of Ge 2 Sb 2 Te 5 using IC1010 and Politex reg pads in acidic slurry | ||
| Journal | Chinese Physics B | ||
| Authors | He, Ao-Dong | Author | |
| Liu, Bo | Author | ||
| Song, Zhi-Tang | Author | ||
| Wang, Liang-Yong | Author | ||
| Liu, Wei-Li | Author | ||
| Feng, Gao-Ming | Author | ||
| Feng, Song-Lin | Author | ||
| Year | 2014 (August) | Volume | 23 |
| Publisher | IOP Publishing | ||
| DOI | doi:10.1088/1674-1056/23/8/088502Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 6005344 | Long-form Identifier | mindat:1:5:6005344:4 |
| GUID | 0 | ||
| Full Reference | He, Ao-Dong, Liu, Bo, Song, Zhi-Tang, Wang, Liang-Yong, Liu, Wei-Li, Feng, Gao-Ming, Feng, Song-Lin (2014) Chemical mechanical planarization of Ge 2 Sb 2 Te 5 using IC1010 and Politex reg pads in acidic slurry. Chinese Physics B, 23. 88502pp. doi:10.1088/1674-1056/23/8/088502 | ||
| Plain Text | He, Ao-Dong, Liu, Bo, Song, Zhi-Tang, Wang, Liang-Yong, Liu, Wei-Li, Feng, Gao-Ming, Feng, Song-Lin (2014) Chemical mechanical planarization of Ge 2 Sb 2 Te 5 using IC1010 and Politex reg pads in acidic slurry. Chinese Physics B, 23. 88502pp. doi:10.1088/1674-1056/23/8/088502 | ||
| In | (n.d.) Chinese Physics B Vol. 23. IOP Publishing | ||
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