Yan, Wei-Xia, Wang, Liang-Yong, Zhang, Ze-Fang, Liu, Wei-Li, Song, Zhi-Tang (2014) Iron trichloride as oxidizer in acid slurry for chemical mechanical polishing of Ge 2 Sb 2 Te 5. Chinese Physics B, 23. 48301pp. doi:10.1088/1674-1056/23/4/048301
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Iron trichloride as oxidizer in acid slurry for chemical mechanical polishing of Ge 2 Sb 2 Te 5 | ||
| Journal | Chinese Physics B | ||
| Authors | Yan, Wei-Xia | Author | |
| Wang, Liang-Yong | Author | ||
| Zhang, Ze-Fang | Author | ||
| Liu, Wei-Li | Author | ||
| Song, Zhi-Tang | Author | ||
| Year | 2014 (April) | Volume | 23 |
| Publisher | IOP Publishing | ||
| DOI | doi:10.1088/1674-1056/23/4/048301Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 6004905 | Long-form Identifier | mindat:1:5:6004905:2 |
| GUID | 0 | ||
| Full Reference | Yan, Wei-Xia, Wang, Liang-Yong, Zhang, Ze-Fang, Liu, Wei-Li, Song, Zhi-Tang (2014) Iron trichloride as oxidizer in acid slurry for chemical mechanical polishing of Ge 2 Sb 2 Te 5. Chinese Physics B, 23. 48301pp. doi:10.1088/1674-1056/23/4/048301 | ||
| Plain Text | Yan, Wei-Xia, Wang, Liang-Yong, Zhang, Ze-Fang, Liu, Wei-Li, Song, Zhi-Tang (2014) Iron trichloride as oxidizer in acid slurry for chemical mechanical polishing of Ge 2 Sb 2 Te 5. Chinese Physics B, 23. 48301pp. doi:10.1088/1674-1056/23/4/048301 | ||
| In | (n.d.) Chinese Physics B Vol. 23. IOP Publishing | ||
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