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Capote, G., Prioli, R., Jardim, P.M., Zanatta, A.R., Jacobsohn, L.G., Freire, F.L. (2004) Amorphous hydrogenated carbon films deposited by PECVD: influence of the substrate temperature on film growth and microstructure. Journal of Non-Crystalline Solids, 338. 503-508 doi:10.1016/j.jnoncrysol.2004.03.029

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Reference TypeJournal (article/letter/editorial)
TitleAmorphous hydrogenated carbon films deposited by PECVD: influence of the substrate temperature on film growth and microstructure
JournalJournal of Non-Crystalline Solids
AuthorsCapote, G.Author
Prioli, R.Author
Jardim, P.M.Author
Zanatta, A.R.Author
Jacobsohn, L.G.Author
Freire, F.L.Author
Year2004 (June)Volume338
PublisherElsevier BV
DOIdoi:10.1016/j.jnoncrysol.2004.03.029Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID642190Long-form Identifiermindat:1:5:642190:2
GUID0
Full ReferenceCapote, G., Prioli, R., Jardim, P.M., Zanatta, A.R., Jacobsohn, L.G., Freire, F.L. (2004) Amorphous hydrogenated carbon films deposited by PECVD: influence of the substrate temperature on film growth and microstructure. Journal of Non-Crystalline Solids, 338. 503-508 doi:10.1016/j.jnoncrysol.2004.03.029
Plain TextCapote, G., Prioli, R., Jardim, P.M., Zanatta, A.R., Jacobsohn, L.G., Freire, F.L. (2004) Amorphous hydrogenated carbon films deposited by PECVD: influence of the substrate temperature on film growth and microstructure. Journal of Non-Crystalline Solids, 338. 503-508 doi:10.1016/j.jnoncrysol.2004.03.029
In(2004) Journal of Non-Crystalline Solids Vol. 338. Elsevier BV

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Motta, E.F., Pereyra, I. (2004) Amorphous hydrogenated carbon-nitride films prepared by RF-PECVD in methane–nitrogen atmospheres. Journal of Non-Crystalline Solids, 338. 525-529 doi:10.1016/j.jnoncrysol.2004.03.034
Freire, F.L. (2002) Amorphous hydrogenated carbon films: effects of nitrogen and fluorine incorporation on the film microstructure and mechanical properties: a review. Journal of Non-Crystalline Solids, 304 (1) 251-258 doi:10.1016/s0022-3093(02)01031-1
Zanatta, A.R., Ribeiro, C.T.M., Jahn, U. (2004) Photon and electron excitation of rare-earth-doped amorphous SiN films. Journal of Non-Crystalline Solids, 338. 473-476 doi:10.1016/j.jnoncrysol.2004.03.022
Forhan, N.A.E., Fantini, M.C.A., Pereyra, I. (2004) Nano-crystalline Si1−xCx:H thin films deposited by PECVD for SiC-on-insulator application. Journal of Non-Crystalline Solids, 338. 119-122 doi:10.1016/j.jnoncrysol.2004.02.034
Miyajima, Shinsuke, Sawamura, Makoto, Yamada, Akira, Konagai, Makoto (2008) Properties of n-type hydrogenated nanocrystalline cubic silicon carbide films deposited by VHF-PECVD at a low substrate temperature. Journal of Non-Crystalline Solids, 354 (19) 2350-2354 doi:10.1016/j.jnoncrysol.2007.09.085
Maître, N., Camelio, S., Barranco, A., Girardeau, Th., Breelle, E. (2005) Physical and chemical properties of amorphous hydrogenated carbon films deposited by PECVD in a low self-bias range. Journal of Non-Crystalline Solids, 351 (10) 877-884 doi:10.1016/j.jnoncrysol.2005.01.058
Zhang, Yiying, Du, Piyi, Zhang, Ran, Han, Gaorong, Weng, Wenjian (2008) Structure and properties of hydrogenated amorphous silicon carbide thin films deposited by PECVD. Journal of Non-Crystalline Solids, 354 (12) 1435-1439 doi:10.1016/j.jnoncrysol.2006.11.047
Jian, Sheng-Rui, Fang, Te-Hua, Chuu, Der-San (2004) Nanoindentation investigation of amorphous hydrogenated carbon thin films deposited by ECR-MPCVD. Journal of Non-Crystalline Solids, 333 (3) 291-295 doi:10.1016/j.jnoncrysol.2003.10.012
Hao, Junying, Xu, Tao, Liu, Weimin (2005) Effect of deposition pressure on microstructure and properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD. Journal of Non-Crystalline Solids, 351 (49) 3671-3676 doi:10.1016/j.jnoncrysol.2005.10.013
Ferreira, I., Fortunato, E., Vilarinho, P., Viana, A.S., Ramos, A.R., Alves, E., Martins, R. (2006) Hydrogenated silicon carbon nitride films obtained by HWCVD, PA-HWCVD and PECVD techniques. Journal of Non-Crystalline Solids, 352 (9) 1361-1366 doi:10.1016/j.jnoncrysol.2006.02.025
Ribeiro, C.T.M., Zanatta, A.R. (2006) Spectroscopic investigation of Nd-doped amorphous SiN films. Journal of Non-Crystalline Solids, 352 (9) 1286-1289 doi:10.1016/j.jnoncrysol.2005.11.142
 
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