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Motta, E.F., Pereyra, I. (2004) Amorphous hydrogenated carbon-nitride films prepared by RF-PECVD in methane–nitrogen atmospheres. Journal of Non-Crystalline Solids, 338. 525-529 doi:10.1016/j.jnoncrysol.2004.03.034

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Reference TypeJournal (article/letter/editorial)
TitleAmorphous hydrogenated carbon-nitride films prepared by RF-PECVD in methane–nitrogen atmospheres
JournalJournal of Non-Crystalline Solids
AuthorsMotta, E.F.Author
Pereyra, I.Author
Year2004 (June)Volume338
PublisherElsevier BV
DOIdoi:10.1016/j.jnoncrysol.2004.03.034Search in ResearchGate
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Mindat Ref. ID642195Long-form Identifiermindat:1:5:642195:7
GUID0
Full ReferenceMotta, E.F., Pereyra, I. (2004) Amorphous hydrogenated carbon-nitride films prepared by RF-PECVD in methane–nitrogen atmospheres. Journal of Non-Crystalline Solids, 338. 525-529 doi:10.1016/j.jnoncrysol.2004.03.034
Plain TextMotta, E.F., Pereyra, I. (2004) Amorphous hydrogenated carbon-nitride films prepared by RF-PECVD in methane–nitrogen atmospheres. Journal of Non-Crystalline Solids, 338. 525-529 doi:10.1016/j.jnoncrysol.2004.03.034
In(2004) Journal of Non-Crystalline Solids Vol. 338. Elsevier BV

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Forhan, N.A.E., Fantini, M.C.A., Pereyra, I. (2004) Nano-crystalline Si1−xCx:H thin films deposited by PECVD for SiC-on-insulator application. Journal of Non-Crystalline Solids, 338. 119-122 doi:10.1016/j.jnoncrysol.2004.02.034
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Yokomichi, H., Futakuchi, T., Yasuoka, M., Kishimoto, N. (2004) Fabrication of amorphous boron–carbon–nitrogen films by hot-wire CVD. Journal of Non-Crystalline Solids, 338. 509-512 doi:10.1016/j.jnoncrysol.2004.03.030
Tabata, A., Kuroda, M., Mori, M., Mizutani, T., Suzuoki, Y. (2004) Band gap control of hydrogenated amorphous silicon carbide films prepared by hot-wire chemical vapor deposition. Journal of Non-Crystalline Solids, 338. 521-524 doi:10.1016/j.jnoncrysol.2004.03.033
Ferreira, I., Fortunato, E., Vilarinho, P., Viana, A.S., Ramos, A.R., Alves, E., Martins, R. (2006) Hydrogenated silicon carbon nitride films obtained by HWCVD, PA-HWCVD and PECVD techniques. Journal of Non-Crystalline Solids, 352 (9) 1361-1366 doi:10.1016/j.jnoncrysol.2006.02.025
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