Fan, D., Jaccodine, R. J. (1989) Reduction of transient‐enhanced diffusion of boron in silicon by implantation through oxide. Applied Physics Letters, 54 (7). 603-605 doi:10.1063/1.100891
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Reduction of transient‐enhanced diffusion of boron in silicon by implantation through oxide | ||
Journal | Applied Physics Letters | ||
Authors | Fan, D. | Author | |
Jaccodine, R. J. | Author | ||
Year | 1989 (February 13) | Volume | 54 |
Issue | 7 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.100891Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8487466 | Long-form Identifier | mindat:1:5:8487466:7 |
GUID | 0 | ||
Full Reference | Fan, D., Jaccodine, R. J. (1989) Reduction of transient‐enhanced diffusion of boron in silicon by implantation through oxide. Applied Physics Letters, 54 (7). 603-605 doi:10.1063/1.100891 | ||
Plain Text | Fan, D., Jaccodine, R. J. (1989) Reduction of transient‐enhanced diffusion of boron in silicon by implantation through oxide. Applied Physics Letters, 54 (7). 603-605 doi:10.1063/1.100891 | ||
In | (1989, February) Applied Physics Letters Vol. 54 (7) AIP Publishing |
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