Reference Type | Journal (article/letter/editorial) |
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Title | Reduction of transient boron diffusion in preamorphized Si by carbon implantation |
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Journal | Applied Physics Letters |
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Authors | Nishikawa, Satoshi | Author |
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Tanaka, Akira | Author |
Yamaji, Tetsuo | Author |
Year | 1992 (May 4) | Volume | 60 |
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Issue | 18 |
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Publisher | AIP Publishing |
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DOI | doi:10.1063/1.107051Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 8498497 | Long-form Identifier | mindat:1:5:8498497:3 |
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GUID | 0 |
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Full Reference | Nishikawa, Satoshi, Tanaka, Akira, Yamaji, Tetsuo (1992) Reduction of transient boron diffusion in preamorphized Si by carbon implantation. Applied Physics Letters, 60 (18). 2270-2272 doi:10.1063/1.107051 |
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Plain Text | Nishikawa, Satoshi, Tanaka, Akira, Yamaji, Tetsuo (1992) Reduction of transient boron diffusion in preamorphized Si by carbon implantation. Applied Physics Letters, 60 (18). 2270-2272 doi:10.1063/1.107051 |
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In | (1992, May) Applied Physics Letters Vol. 60 (18) AIP Publishing |
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