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Heinrich, F., Stoll, H.‐P., Scheer, H.‐C. (1989) New and simple optical method forinsituetch rate determination and endpoint detection. Applied Physics Letters, 55 (14). 1474-1476 doi:10.1063/1.102301

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Reference TypeJournal (article/letter/editorial)
TitleNew and simple optical method forinsituetch rate determination and endpoint detection
JournalApplied Physics Letters
AuthorsHeinrich, F.Author
Stoll, H.‐P.Author
Scheer, H.‐C.Author
Year1989 (October 2)Volume55
Issue14
PublisherAIP Publishing
DOIdoi:10.1063/1.102301Search in ResearchGate
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Mindat Ref. ID8488075Long-form Identifiermindat:1:5:8488075:6
GUID0
Full ReferenceHeinrich, F., Stoll, H.‐P., Scheer, H.‐C. (1989) New and simple optical method forinsituetch rate determination and endpoint detection. Applied Physics Letters, 55 (14). 1474-1476 doi:10.1063/1.102301
Plain TextHeinrich, F., Stoll, H.‐P., Scheer, H.‐C. (1989) New and simple optical method forinsituetch rate determination and endpoint detection. Applied Physics Letters, 55 (14). 1474-1476 doi:10.1063/1.102301
In(1989, October) Applied Physics Letters Vol. 55 (14) AIP Publishing

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Heinrich, F., Stoll, H.‐P., Scheer, H.‐C., Hoffmann, P. (1990) Energy analysis of neutral atoms in broad oxygen ion beams by Doppler‐shift measurements. Journal of Applied Physics, 68 (11). 5428-5434 doi:10.1063/1.346998
Heinrich, F., Stoll, H.‐P., Hoffmann, P., Scheer, H.‐C. (1992) Ion beam diagnostics by Doppler shifted light emissionsa). Review of Scientific Instruments, 63 (5). 3063-3067 doi:10.1063/1.1142607
Heinrich, F., Stoll, H.‐P., Hoffmann, P., Scheer, H.‐C. (1992) Ion beam diagnostics by Doppler shifted light emissions (abstract)a). Review of Scientific Instruments, 63 (4). 2393 doi:10.1063/1.1142939
Benck, E. C., Rong, Z., Chen, S. H., Tang, Z. C., Schuessler, H. A. (1991) Cavity‐enhanced detection of surface photovaporization. Applied Physics Letters, 58 (14). 1476-1478 doi:10.1063/1.105246
Hoffmann, P., Stoll, H.‐P., Heinrich, F. (1993) Fragmentation processes in reactive molecular ion beam etching. Journal of Applied Physics, 74 (12). 7517-7520 doi:10.1063/1.354977
Lee, Mark, Mitrofanov, O., Katz, H. E., Erben, C. (2002) Millimeter-wave dielectric properties of electro-optic polymer materials. Applied Physics Letters, 81 (8). 1474-1476 doi:10.1063/1.1499767
Bo/rgesen, P., Lilienfeld, D. A., Johnson, H. H. (1989) Au‐Ag ion mixing rate—disagreement with theory resolved. Applied Physics Letters, 55 (24). 2497-2499 doi:10.1063/1.102010
Hirlimann, C., Morhange, J. F., Kanehisa, M. A., Chevy, A., Brito Cruz, C. H. (1989) Resonant excitonic optical Stark effect in GaSe. Applied Physics Letters, 55 (22). 2307-2309 doi:10.1063/1.102046
Horsthuis, Winfried H. G., Krijnen, Gijs J. M. (1989) Simple measuring method for electro‐optic coefficients in poled polymer waveguides. Applied Physics Letters, 55 (7). 616-618 doi:10.1063/1.101827
Monchalin, J.‐P., Héon, R., Bouchard, P., Padioleau, C. (1989) Broadband optical detection of ultrasound by optical sideband stripping with a confocal Fabry–Perot. Applied Physics Letters, 55 (16). 1612-1614 doi:10.1063/1.102235
Alaya, S., Maaref, H., Bourgoin, J. C. (1989) Luminescence of theDXcenter in AlGaAs. Applied Physics Letters, 55 (14). 1406-1408 doi:10.1063/1.101608
 
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