Rogers, W. Boyd, Massoud, Hisham Z. (1989) Transfer of patterns from the backside of a silicon wafer coated with Si3N4to its front surface during wet oxidation. Applied Physics Letters, 55 (2). 159-161 doi:10.1063/1.102398
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Transfer of patterns from the backside of a silicon wafer coated with Si3N4to its front surface during wet oxidation | ||
| Journal | Applied Physics Letters | ||
| Authors | Rogers, W. Boyd | Author | |
| Massoud, Hisham Z. | Author | ||
| Year | 1989 (July 10) | Volume | 55 |
| Issue | 2 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.102398Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 8488505 | Long-form Identifier | mindat:1:5:8488505:2 |
| GUID | 0 | ||
| Full Reference | Rogers, W. Boyd, Massoud, Hisham Z. (1989) Transfer of patterns from the backside of a silicon wafer coated with Si3N4to its front surface during wet oxidation. Applied Physics Letters, 55 (2). 159-161 doi:10.1063/1.102398 | ||
| Plain Text | Rogers, W. Boyd, Massoud, Hisham Z. (1989) Transfer of patterns from the backside of a silicon wafer coated with Si3N4to its front surface during wet oxidation. Applied Physics Letters, 55 (2). 159-161 doi:10.1063/1.102398 | ||
| In | (1989, July) Applied Physics Letters Vol. 55 (2) AIP Publishing | ||
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