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Scherer, A., Roukes, M. L. (1989) Quantum device microfabrication: Resolution limits of ion beam patterning. Applied Physics Letters, 55 (4). 377-379 doi:10.1063/1.101876

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Reference TypeJournal (article/letter/editorial)
TitleQuantum device microfabrication: Resolution limits of ion beam patterning
JournalApplied Physics Letters
AuthorsScherer, A.Author
Roukes, M. L.Author
Year1989 (July 24)Volume55
Issue4
PublisherAIP Publishing
DOIdoi:10.1063/1.101876Search in ResearchGate
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Mindat Ref. ID8489097Long-form Identifiermindat:1:5:8489097:5
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Full ReferenceScherer, A., Roukes, M. L. (1989) Quantum device microfabrication: Resolution limits of ion beam patterning. Applied Physics Letters, 55 (4). 377-379 doi:10.1063/1.101876
Plain TextScherer, A., Roukes, M. L. (1989) Quantum device microfabrication: Resolution limits of ion beam patterning. Applied Physics Letters, 55 (4). 377-379 doi:10.1063/1.101876
In(1989, July) Applied Physics Letters Vol. 55 (4) AIP Publishing

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Cheeks, T. L., Roukes, M. L., Scherer, A., Craighead, H. G. (1988) Narrow conducting channels defined by helium ion beam damage. Applied Physics Letters, 53 (20). 1964-1966 doi:10.1063/1.100337
Harriott, L. R., Polakos, P. A., Rice, C. E. (1989) High‐resolution patterning of highTcsuperconductors. Applied Physics Letters, 55 (5). 495-497 doi:10.1063/1.102429
Thornton, T. J., Roukes, M. L., Scherer, A., Van de Gaag, B. P. (1989) Boundary scattering in quantum wires. Physical Review Letters, 63 (19). 2128-2131 doi:10.1103/physrevlett.63.2128
Scherer, A., Roukes, M. L., Craighead, H. G., Ruthen, R. M., Beebe, E. D., Harbison, J. P. (1987) Ultranarrow conducting channels defined in GaAs‐AlGaAs by low‐energy ion damage. Applied Physics Letters, 51 (25). 2133-2135 doi:10.1063/1.98970
Van der Gaag, B. P., Scherer, A. (1990) Microfabrication below 10 nm. Applied Physics Letters, 56 (5). 481-483 doi:10.1063/1.102772
Husain, A., Hone, J., Postma, Henk W. Ch., Huang, X. M. H., Drake, T., Barbic, M., Scherer, A., Roukes, M. L. (2003) Nanowire-based very-high-frequency electromechanical resonator. Applied Physics Letters, 83 (6). 1240-1242 doi:10.1063/1.1601311
Klatt, J. L., Averback, R. S., Peak, David (1989) Ion beam mixing in Ag‐Pd alloys. Applied Physics Letters, 55 (13). 1295-1297 doi:10.1063/1.101637
Tatchyn, Roman, Csonka, Paul L. (1987) Attainment of submillimeter periods and a 0.3‐T peak field in a novel micropole undulator device. Applied Physics Letters, 50 (7). 377-379 doi:10.1063/1.98204
Scherer, A., Jewell, J. L., Lee, Y. H., Harbison, J. P., Florez, L. T. (1989) Fabrication of microlasers and microresonator optical switches. Applied Physics Letters, 55 (26). 2724-2726 doi:10.1063/1.101935
Arlett, J. L., Roukes, M. L. (2010) Ultimate and practical limits of fluid-based mass detection with suspended microchannel resonators. Journal of Applied Physics, 108 (8). 84701pp. doi:10.1063/1.3475151
Yee, Camellia M. L., Fedders, P. A., Wolfe, C. M. (1983) Effect of electric fields on Cr redistribution at GaAs surfaces. Applied Physics Letters, 42 (4). 377-379 doi:10.1063/1.93945
 
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