Scherer, A., Roukes, M. L. (1989) Quantum device microfabrication: Resolution limits of ion beam patterning. Applied Physics Letters, 55 (4). 377-379 doi:10.1063/1.101876
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Quantum device microfabrication: Resolution limits of ion beam patterning | ||
Journal | Applied Physics Letters | ||
Authors | Scherer, A. | Author | |
Roukes, M. L. | Author | ||
Year | 1989 (July 24) | Volume | 55 |
Issue | 4 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.101876Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8489097 | Long-form Identifier | mindat:1:5:8489097:5 |
GUID | 0 | ||
Full Reference | Scherer, A., Roukes, M. L. (1989) Quantum device microfabrication: Resolution limits of ion beam patterning. Applied Physics Letters, 55 (4). 377-379 doi:10.1063/1.101876 | ||
Plain Text | Scherer, A., Roukes, M. L. (1989) Quantum device microfabrication: Resolution limits of ion beam patterning. Applied Physics Letters, 55 (4). 377-379 doi:10.1063/1.101876 | ||
In | (1989, July) Applied Physics Letters Vol. 55 (4) AIP Publishing |
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