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Xue, Chaofan, Meng, Xiangyu, Wu, Yanqing, Wang, Yong, Wang, Liansheng, Yang, Shumin, Zhao, Jun, Tai, Renzhong (2018) The wave optical whole process design of the soft X-ray interference lithography beamline at SSRF. Journal of Synchrotron Radiation, 25 (6). 1869-1876 doi:10.1107/s1600577518012833

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Reference TypeJournal (article/letter/editorial)
TitleThe wave optical whole process design of the soft X-ray interference lithography beamline at SSRF
JournalJournal of Synchrotron Radiation
AuthorsXue, ChaofanAuthor
Meng, XiangyuAuthor
Wu, YanqingAuthor
Wang, YongAuthor
Wang, LianshengAuthor
Yang, ShuminAuthor
Zhao, JunAuthor
Tai, RenzhongAuthor
Year2018 (November 1)Volume25
Issue6
PublisherInternational Union of Crystallography (IUCr)
DOIdoi:10.1107/s1600577518012833Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID8489364Long-form Identifiermindat:1:5:8489364:4
GUID0
Full ReferenceXue, Chaofan, Meng, Xiangyu, Wu, Yanqing, Wang, Yong, Wang, Liansheng, Yang, Shumin, Zhao, Jun, Tai, Renzhong (2018) The wave optical whole process design of the soft X-ray interference lithography beamline at SSRF. Journal of Synchrotron Radiation, 25 (6). 1869-1876 doi:10.1107/s1600577518012833
Plain TextXue, Chaofan, Meng, Xiangyu, Wu, Yanqing, Wang, Yong, Wang, Liansheng, Yang, Shumin, Zhao, Jun, Tai, Renzhong (2018) The wave optical whole process design of the soft X-ray interference lithography beamline at SSRF. Journal of Synchrotron Radiation, 25 (6). 1869-1876 doi:10.1107/s1600577518012833
In(2018, November) Journal of Synchrotron Radiation Vol. 25 (6) International Union of Crystallography (IUCr)

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