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Xue, Chaofan, Zhao, Jun, Wu, Yanqing, Yu, Huaina, Yang, Shumin, Wang, Liansheng, Zhao, Wencong, Wu, Qiang, Zhu, Zhichao, Liu, Bo, Zhang, Xia, Zhou, Wenchao, Tai, Renzhong (2017) Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography. Applied Surface Science, 425. 553-557 doi:10.1016/j.apsusc.2017.07.010

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Reference TypeJournal (article/letter/editorial)
TitleFabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography
JournalApplied Surface Science
AuthorsXue, ChaofanAuthor
Zhao, JunAuthor
Wu, YanqingAuthor
Yu, HuainaAuthor
Yang, ShuminAuthor
Wang, LianshengAuthor
Zhao, WencongAuthor
Wu, QiangAuthor
Zhu, ZhichaoAuthor
Liu, BoAuthor
Zhang, XiaAuthor
Zhou, WenchaoAuthor
Tai, RenzhongAuthor
Year2017 (December)Volume425
PublisherElsevier BV
DOIdoi:10.1016/j.apsusc.2017.07.010Search in ResearchGate
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Mindat Ref. ID9932085Long-form Identifiermindat:1:5:9932085:0
GUID0
Full ReferenceXue, Chaofan, Zhao, Jun, Wu, Yanqing, Yu, Huaina, Yang, Shumin, Wang, Liansheng, Zhao, Wencong, Wu, Qiang, Zhu, Zhichao, Liu, Bo, Zhang, Xia, Zhou, Wenchao, Tai, Renzhong (2017) Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography. Applied Surface Science, 425. 553-557 doi:10.1016/j.apsusc.2017.07.010
Plain TextXue, Chaofan, Zhao, Jun, Wu, Yanqing, Yu, Huaina, Yang, Shumin, Wang, Liansheng, Zhao, Wencong, Wu, Qiang, Zhu, Zhichao, Liu, Bo, Zhang, Xia, Zhou, Wenchao, Tai, Renzhong (2017) Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography. Applied Surface Science, 425. 553-557 doi:10.1016/j.apsusc.2017.07.010
In(n.d.) Applied Surface Science Vol. 425. Elsevier BV

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