Reference Type | Journal (article/letter/editorial) |
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Title | Effects of N-induced heterogeneous nucleation and growth of cavities at the CoSi2/polycrystalline–silicon interface |
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Journal | Applied Physics Letters |
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Authors | Alberti, A. | Author |
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La Via, F. | Author |
Rimini, E. | Author |
Year | 2002 (July) | Volume | 81 |
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Issue | 1 |
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Publisher | AIP Publishing |
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DOI | doi:10.1063/1.1488697Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 8532854 | Long-form Identifier | mindat:1:5:8532854:5 |
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GUID | 0 |
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Full Reference | Alberti, A., La Via, F., Rimini, E. (2002) Effects of N-induced heterogeneous nucleation and growth of cavities at the CoSi2/polycrystalline–silicon interface. Applied Physics Letters, 81 (1). 55-57 doi:10.1063/1.1488697 |
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Plain Text | Alberti, A., La Via, F., Rimini, E. (2002) Effects of N-induced heterogeneous nucleation and growth of cavities at the CoSi2/polycrystalline–silicon interface. Applied Physics Letters, 81 (1). 55-57 doi:10.1063/1.1488697 |
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In | (2002, July) Applied Physics Letters Vol. 81 (1) AIP Publishing |
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