Liu, Po-Tsun, Tsai, Chih-Tsung, Yang, Po-Yu (2007) Effects of supercritical CO2 fluid on sputter-deposited hafnium oxide. Applied Physics Letters, 90 (22). 223101pp. doi:10.1063/1.2743747
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Effects of supercritical CO2 fluid on sputter-deposited hafnium oxide | ||
Journal | Applied Physics Letters | ||
Authors | Liu, Po-Tsun | Author | |
Tsai, Chih-Tsung | Author | ||
Yang, Po-Yu | Author | ||
Year | 2007 (May 28) | Volume | 90 |
Issue | 22 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.2743747Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8554328 | Long-form Identifier | mindat:1:5:8554328:7 |
GUID | 0 | ||
Full Reference | Liu, Po-Tsun, Tsai, Chih-Tsung, Yang, Po-Yu (2007) Effects of supercritical CO2 fluid on sputter-deposited hafnium oxide. Applied Physics Letters, 90 (22). 223101pp. doi:10.1063/1.2743747 | ||
Plain Text | Liu, Po-Tsun, Tsai, Chih-Tsung, Yang, Po-Yu (2007) Effects of supercritical CO2 fluid on sputter-deposited hafnium oxide. Applied Physics Letters, 90 (22). 223101pp. doi:10.1063/1.2743747 | ||
In | (2007, May) Applied Physics Letters Vol. 90 (22) AIP Publishing |
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