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Xin, Huolin L., Ercius, Peter, Hughes, Kevin J., Engstrom, James R., Muller, David A. (2010) Three-dimensional imaging of pore structures inside low-κ dielectrics. Applied Physics Letters, 96 (22). 223108pp. doi:10.1063/1.3442496

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Reference TypeJournal (article/letter/editorial)
TitleThree-dimensional imaging of pore structures inside low-κ dielectrics
JournalApplied Physics Letters
AuthorsXin, Huolin L.Author
Ercius, PeterAuthor
Hughes, Kevin J.Author
Engstrom, James R.Author
Muller, David A.Author
Year2010 (May 31)Volume96
Issue22
PublisherAIP Publishing
DOIdoi:10.1063/1.3442496Search in ResearchGate
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Mindat Ref. ID8584051Long-form Identifiermindat:1:5:8584051:5
GUID0
Full ReferenceXin, Huolin L., Ercius, Peter, Hughes, Kevin J., Engstrom, James R., Muller, David A. (2010) Three-dimensional imaging of pore structures inside low-κ dielectrics. Applied Physics Letters, 96 (22). 223108pp. doi:10.1063/1.3442496
Plain TextXin, Huolin L., Ercius, Peter, Hughes, Kevin J., Engstrom, James R., Muller, David A. (2010) Three-dimensional imaging of pore structures inside low-κ dielectrics. Applied Physics Letters, 96 (22). 223108pp. doi:10.1063/1.3442496
In(2010, May) Applied Physics Letters Vol. 96 (22) AIP Publishing

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Xin, Huolin L., Muller, David A. (2010) Three-Dimensional Imaging in Aberration-Corrected Electron Microscopes. Microscopy and Microanalysis, 16 (4). 445-455 doi:10.1017/s1431927610093360
Ercius, Peter, Weyland, Matthew, Muller, David A., Gignac, Lynne M. (2006) Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography. Applied Physics Letters, 88 (24). 243116pp. doi:10.1063/1.2213185
Xin, Huolin L., Dwyer, Christian, Muller, David A., Zheng, Haimei, Ercius, Peter (2013) Scanning Confocal Electron Energy-Loss Microscopy Using Valence-Loss Signals. Microscopy and Microanalysis, 19 (4). 1036-1049 doi:10.1017/s1431927613001438
Jegert, Gunther, Kersch, Alfred, Weinreich, Wenke, Schröder, Uwe, Lugli, Paolo (2010) Modeling of leakage currents in high-κ dielectrics: Three-dimensional approach via kinetic Monte Carlo. Applied Physics Letters, 96 (6). 62113pp. doi:10.1063/1.3310065
Xin, Huolin L., Intaraprasonk, Varat, Muller, David A. (2008) Depth sectioning of individual dopant atoms with aberration-corrected scanning transmission electron microscopy. Applied Physics Letters, 92 (1). 13125pp. doi:10.1063/1.2828990
Muller, DA, Intaraprasonk, V, Xin, H, Ercius, P (2007) Prospects for Three-Dimensional, Sub-Nanometer Imaging with Aberration-Corrected ADF-STEM. Microscopy and Microanalysis, 13. doi:10.1017/s1431927607079573
Yurtsever, Aycan, Weyland, Matthew, Muller, David A. (2006) Three-dimensional imaging of nonspherical silicon nanoparticles embedded in silicon oxide by plasmon tomography. Applied Physics Letters, 89 (15). 151920pp. doi:10.1063/1.2360906
Xin, Huolin L., Muller, David A. (2010) A new spin on electron beams. Nature Nanotechnology, 5 (11). 764-765 doi:10.1038/nnano.2010.222
Casse, B. D. F., Lu, W. T., Huang, Y. J., Gultepe, E., Menon, L., Sridhar, S. (2010) Super-resolution imaging using a three-dimensional metamaterials nanolens. Applied Physics Letters, 96 (2). 23114pp. doi:10.1063/1.3291677
Ercius, P, Xin, HL, Muller, DA (2009) Measurements of Porous Networks in Low-k Dielectric by Three-dimensional Electron Tomography. Microscopy and Microanalysis, 15. 1240-1241 doi:10.1017/s143192760909802x
Intaraprasonk, Varat, Xin, Huolin L., Muller, David A. (2008) Analytic derivation of optimal imaging conditions for incoherent imaging in aberration-corrected electron microscopes. Ultramicroscopy, 108 (11). 1454-1466 doi:10.1016/j.ultramic.2008.05.013
 
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