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Behera, Swayambhu, Lee, Joe, Gaddam, Sneha, Pokharel, Sundari, Wilks, Justin, Pasquale, Frank, Graves, David, Kelber, Jeffry A. (2010) Interaction of vacuum ultraviolet light with a low-k organosilicate glass film in the presence of NH3. Applied Physics Letters, 97 (3). 34104pp. doi:10.1063/1.3466905

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Reference TypeJournal (article/letter/editorial)
TitleInteraction of vacuum ultraviolet light with a low-k organosilicate glass film in the presence of NH3
JournalApplied Physics Letters
AuthorsBehera, SwayambhuAuthor
Lee, JoeAuthor
Gaddam, SnehaAuthor
Pokharel, SundariAuthor
Wilks, JustinAuthor
Pasquale, FrankAuthor
Graves, DavidAuthor
Kelber, Jeffry A.Author
Year2010 (July 19)Volume97
Issue3
PublisherAIP Publishing
DOIdoi:10.1063/1.3466905Search in ResearchGate
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Mindat Ref. ID8589636Long-form Identifiermindat:1:5:8589636:5
GUID0
Full ReferenceBehera, Swayambhu, Lee, Joe, Gaddam, Sneha, Pokharel, Sundari, Wilks, Justin, Pasquale, Frank, Graves, David, Kelber, Jeffry A. (2010) Interaction of vacuum ultraviolet light with a low-k organosilicate glass film in the presence of NH3. Applied Physics Letters, 97 (3). 34104pp. doi:10.1063/1.3466905
Plain TextBehera, Swayambhu, Lee, Joe, Gaddam, Sneha, Pokharel, Sundari, Wilks, Justin, Pasquale, Frank, Graves, David, Kelber, Jeffry A. (2010) Interaction of vacuum ultraviolet light with a low-k organosilicate glass film in the presence of NH3. Applied Physics Letters, 97 (3). 34104pp. doi:10.1063/1.3466905
In(2010, July) Applied Physics Letters Vol. 97 (3) AIP Publishing

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