Chaudhari, Mrunalkumar, Du, Jincheng, Behera, Swayambhu, Manandhar, Sudha, Gaddam, Sneha, Kelber, Jeffry (2009) Fundamental mechanisms of oxygen plasma-induced damage of ultralow-k organosilicate materials: The role of thermal P3 atomic oxygen. Applied Physics Letters, 94 (20). 204102pp. doi:10.1063/1.3134487
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Fundamental mechanisms of oxygen plasma-induced damage of ultralow-k organosilicate materials: The role of thermal P3 atomic oxygen | ||
| Journal | Applied Physics Letters | ||
| Authors | Chaudhari, Mrunalkumar | Author | |
| Du, Jincheng | Author | ||
| Behera, Swayambhu | Author | ||
| Manandhar, Sudha | Author | ||
| Gaddam, Sneha | Author | ||
| Kelber, Jeffry | Author | ||
| Year | 2009 (May 18) | Volume | 94 |
| Issue | 20 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.3134487Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 8574209 | Long-form Identifier | mindat:1:5:8574209:1 |
| GUID | 0 | ||
| Full Reference | Chaudhari, Mrunalkumar, Du, Jincheng, Behera, Swayambhu, Manandhar, Sudha, Gaddam, Sneha, Kelber, Jeffry (2009) Fundamental mechanisms of oxygen plasma-induced damage of ultralow-k organosilicate materials: The role of thermal P3 atomic oxygen. Applied Physics Letters, 94 (20). 204102pp. doi:10.1063/1.3134487 | ||
| Plain Text | Chaudhari, Mrunalkumar, Du, Jincheng, Behera, Swayambhu, Manandhar, Sudha, Gaddam, Sneha, Kelber, Jeffry (2009) Fundamental mechanisms of oxygen plasma-induced damage of ultralow-k organosilicate materials: The role of thermal P3 atomic oxygen. Applied Physics Letters, 94 (20). 204102pp. doi:10.1063/1.3134487 | ||
| In | (2009, May) Applied Physics Letters Vol. 94 (20) AIP Publishing | ||
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